Effects of the magnetic field strength on the modulated pulsed power magnetron sputtering of metallic films
2011 ◽
Vol 29
(6)
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pp. 061301
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Keyword(s):
1976 ◽
Vol 32
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pp. 613-622
2017 ◽
Vol 315
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pp. 258-267
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Keyword(s):
2003 ◽
Vol 13
(12)
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pp. 3783-3789
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2019 ◽
Vol 21
(25)
◽
pp. 13696-13705
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Keyword(s):
Keyword(s):
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