Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling

2011 ◽  
Vol 29 (2) ◽  
pp. 021205 ◽  
Author(s):  
Guangyuan Si ◽  
Aaron J. Danner ◽  
Siew Lang Teo ◽  
Ee Jin Teo ◽  
Jinghua Teng ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Aspect Ratio ◽  
Lithium Niobate ◽  
Crystal Structures ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

scholarly journals Focused Ion Beam Fabrication of SU-8 Waveguide Structures on Oxidized Silicon

MRS Advances ◽  
2017 ◽  
Vol 2 (18) ◽  
pp. 981-986 ◽  
Author(s):  
Swagata Samanta ◽  
Pallab Banerji ◽  
Pranabendu Ganguly
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Silicon Substrate ◽  
Focused Ion Beam ◽  
Ion Beam

ABSTRACTThis work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.

scholarly journals Focused ion beam milling of microchannels in lithium niobate

2012 ◽  
Vol 6 (1) ◽  
pp. 012819 ◽  
Author(s):  
Manoj Sridhar ◽  
Devendra K. Maurya ◽  
James R. Friend ◽  
Leslie Y. Yeo
Keyword(s):  
Lithium Niobate ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

2013 ◽  
Vol 24 (46) ◽  
pp. 465701 ◽  
Author(s):  
Alexey Savenko ◽  
Izzet Yildiz ◽  
Dirch Hjorth Petersen ◽  
Peter Bøggild ◽  
Malte Bartenwerfer ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Afm Tips ◽  
Focused Ion Beam Milling

scholarly journals Nanostructuring lithium niobate substrates by focused ion beam milling

2005 ◽  
Vol 27 (8) ◽  
pp. 1421-1425 ◽  
Author(s):  
F. Lacour ◽  
N. Courjal ◽  
M.-P. Bernal ◽  
A. Sabac ◽  
C. Bainier ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling
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