Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
2011 ◽
Vol 29
(1)
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pp. 01A304
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2011 ◽
Vol 11
(9)
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pp. 8378-8382
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2019 ◽
Vol 254
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pp. 587-593
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2022 ◽
Vol 40
(1)
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pp. 012401
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2015 ◽
Vol 33
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pp. 01A135
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2013 ◽
Vol 31
(1)
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pp. 01A136
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