Inspection of open defects in a thin film transistor-liquid crystal display panel by using a low-energy electron microcolumn

2010 ◽  
Vol 28 (6) ◽  
pp. C6C69-C6C73 ◽  
Author(s):  
Tae Sik Oh ◽  
Dae-Wook Kim ◽  
Young Chul Kim ◽  
Seungjoon Ahn ◽  
Gun-hee Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Liquid Crystal ◽  
Liquid Crystal Display ◽  
Thin Film Transistor ◽  
Low Energy ◽  
Energy Electron ◽  
Liquid Crystal Display Panel ◽  
Low Energy Electron ◽  
Open Defects

Low Energy Electron Beam Activated IGZO-based Thin Film Transistor

2020 ◽  
Vol 76 (8) ◽  
pp. 715-721
Author(s):  
Moon Uk Cho ◽  
Yu-Jung Cha ◽  
Mirang Byeon ◽  
Young Joon Yoon ◽  
Joon Seop Kwak
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Thin Film Transistor ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron
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