Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

2010 ◽  
Vol 28 (4) ◽  
pp. 783-788 ◽  
Author(s):  
Daniel J. Shir ◽  
Erik C. Nelson ◽  
Debashis Chanda ◽  
Andrew Brzezinski ◽  
Paul V. Braun ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Three Dimensional ◽  
Phase Mask ◽  
Two Photon

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

2009 ◽  
Vol 94 (1) ◽  
pp. 011101 ◽  
Author(s):  
D. Shir ◽  
E. C. Nelson ◽  
Y. C. Chen ◽  
A. Brzezinski ◽  
H. Liao ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Three Dimensional ◽  
Phase Mask ◽  
Two Photon ◽  
Silicon Photonic

An Exhaustive Analysis of the Characterization of Photopolymer Material (SZ2080) by Two-Photon Polymerization, Waves Moving in a Periodic Potential, and Two-Photon Absorption

2020 ◽  
Vol 1003 ◽  
pp. 165-172 ◽  
Author(s):  
Ritu Walia ◽  
Kamal Nain Chopra
Keyword(s):  
Photonic Crystals ◽  
Quantum Coherence ◽  
Periodic Potential ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Polymerization Waves ◽  
Two Photon Polymerization

This paper presents an Exhaustive Analysis of the Characterization of Photopolymer Material (SZ2080) by Two-Photon Polymerization, and some of the modern concepts like Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization, Waves Moving in a Periodic Potential, and Optical Quantum metamaterials. Two-photon polymerization for fabricating three-dimensional subdiffraction-limited structures has been discussed. Experimental and Computed Curves of line thickness (nm) vs feed rate (μm/s) have been technically analyzed. Waves moving in a Periodic Potential and Photonic Crystals have been technically discussed. In addition, Optical Quantum metamaterials have been discussed in terms of quantum coherence, and quantum dots with emphasis on cavity array metamaterial.

Three-dimensional photonic crystals containing designed defects achieved with two-photon photopolymerization

2009 ◽  
Vol 7 (2) ◽  
pp. 165-168
Author(s):  
周明 Ming Zhou ◽  
张伟 Wei Zhang ◽  
孔俊杰 Junjie Kong ◽  
杨海峰 Haifeng Yang ◽  
蔡兰 Lan Cai
Keyword(s):  
Photonic Crystals ◽  
Three Dimensional ◽  
Two Photon

Rapid Fabrication of Three-Dimensional Woodpile Photonic Crystals by Means of Two-Photon Photopolymerization

2007 ◽  
Vol 24 (11) ◽  
pp. 3164-3167
Author(s):  
Zhou Ming ◽  
Kong Jun-Jie ◽  
Yang Hai-Feng ◽  
Yan Feng ◽  
Cai Lan
Keyword(s):  
Photonic Crystals ◽  
Three Dimensional ◽  
Two Photon ◽  
Rapid Fabrication

Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser

2014 ◽  
Vol 2 (3) ◽  
Author(s):  
Yinan Tian ◽  
Hyukjoon Kwon ◽  
Yung C. Shin ◽  
Galen B. King
Keyword(s):  
Photonic Crystals ◽  
Optical Sensors ◽  
Empirical Relationship ◽  
Three Dimensional ◽  
Scanning Speed ◽  
Sem Images ◽  
Two Photon ◽  
High Uniformity ◽  
Two Photon Polymerization

Two-photon polymerization (2PP) is a powerful technique in fabricating three-dimensional subdiffraction-limited structures. In this paper, 2PP was applied to generate woodpile structures, one kind of photonic crystal, using SZ2080, which is widely used in 2PP due to its negligible shrinkage. First, the relationship between scanning speed, laser power, and resolution was determined through fabricating free-hanging lines by theoretical and experimental study. Based on this relationship, woodpile structures with different period distances were fabricated with high uniformity as shown by scanning electron microscopy (SEM) images. Then optical properties of woodpile structures were investigated using Fourier transform infrared spectroscopy (FTIR) and a quantitative empirical relationship between period distance and band gaps was established. The empirical relationship can be applied to design woodpile photonic crystals for the optical sensors and filters.

scholarly journals Tuning of the Optical Properties in Photonic Crystals Made of Macroporous Silicon

2008 ◽  
Vol 2008 ◽  
pp. 1-12 ◽  
Author(s):  
Heinz-S. Kitzerow ◽  
Heinrich Matthias ◽  
Stefan L. Schweizer ◽  
Henry M. van Driel ◽  
Ralf B. Wehrspohn
Keyword(s):  
Photonic Crystals ◽  
Electrochemical Etching ◽  
Free Charge Carrier ◽  
Three Dimensional ◽  
Critical Discussion ◽  
Macroporous Silicon ◽  
Carrier Injection ◽  
Two Photon ◽  
Dielectric Liquids ◽  
Integrated Optical

It is well known that robust and reliable photonic crystal structures can be manufactured with very high precision by electrochemical etching of silicon wafers, which results in two- and three-dimensional photonic crystals made of macroporous silicon. However, tuning of the photonic properties is necessary in order to apply these promising structures in integrated optical devices. For this purpose, different effects have been studied, such as the infiltration with addressable dielectric liquids (liquid crystals), the utilization of Kerr-like nonlinearities of the silicon, or free-charge carrier injection by means of linear (one-photon) and nonlinear (two-photon) absorptions. The present article provides a review, critical discussion, and perspectives about state-of-the-art tuning capabilities.

Two-Photon Polymerization for Three-Dimensional Photonic Devices in Polymers and Nanocomposites

2007 ◽  
Vol 60 (7) ◽  
pp. 484 ◽  
Author(s):  
Baohua Jia ◽  
Jiafang Li ◽  
Min Gu
Keyword(s):  
Photonic Crystals ◽  
Light Propagation ◽  
Three Dimensional ◽  
Photonic Devices ◽  
Polymer Materials ◽  
Optical Elements ◽  
Two Photon ◽  
Integrated Optical ◽  
Nanocrystal Quantum Dots ◽  
Two Photon Polymerization

Fabrication of micro- or nano-scale photonic devices in polymer materials to control and manipulate light propagation represents a hot topic nowadays. Compared with conventional semiconductor materials, polymers are easy to prepare and have the flexibility of incorporating active materials to realise various functionalities. As one of the most powerful tools in micro-optical fabrication, the two-photon polymerization technique has been widely employed recently to produce multifarious photonic devices, particularly the photonic crystals, which are promising candidates for integrated optical devices. In this article the recent advances in the fabrication of three-dimensional photonic devices such as diffractive optical elements, photonic crystals, and superprisms in polymer materials using the two-photon polymerization technique are reviewed. In particular, the fabrication of photonic crystals in nanocomposite polymers, which are formed by incorporating nanocrystal quantum dots into polymer materials, is demonstrated, providing an interesting physical platform for the investigation into new types of active micro-devices.

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