Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon

2010 ◽  
Vol 28 (3) ◽  
pp. 511-516 ◽  
Author(s):  
C. Penley ◽  
F. A. Stevie ◽  
D. P. Griffis ◽  
S. Siebel ◽  
L. Kulig ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Low Dose ◽  
Secondary Ion Mass Spectrometry ◽  
Anomalous Behavior ◽  
Ion Mass Spectrometry ◽  
Phosphorus In Silicon ◽  
Secondary Ion ◽  
Ion Implanted

Characterization of the superlattice region of a quantum cascade laser by secondary ion mass spectrometry

Nanoscale ◽  
2017 ◽  
Vol 9 (44) ◽  
pp. 17571-17575 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Piotr Gutowski ◽  
Dorota Pierścińska ◽  
Kamil Pierściński ◽  
Maciej Bugajski ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Quantum Cascade Laser ◽  
Secondary Ion Mass Spectrometry ◽  
Quantum Cascade ◽  
Oxygen Contamination ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Non-uniform oxygen contamination in the superlattice region of a quantum cascade laser measured by secondary ion mass spectrometry.

Imaging and 3D Elemental Characterization of Intact Bacterial Spores by High-Resolution Secondary Ion Mass Spectrometry

2008 ◽  
Vol 80 (15) ◽  
pp. 5986-5992 ◽  
Author(s):  
Sutapa Ghosal ◽  
Stewart J. Fallon ◽  
Terrance J. Leighton ◽  
Katherine E. Wheeler ◽  
Michael J. Kristo ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
High Resolution ◽  
Secondary Ion Mass Spectrometry ◽  
Bacterial Spores ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Elemental Characterization
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