Spatial distribution of electrical properties for Al-doped ZnO films deposited by dc magnetron sputtering using various inert gases

Yasushi Sato; Keita Ishihara; Nobuto Oka; Yuzo Shigesato

doi:10.1116/1.3319357

Spatial distribution of electrical properties for Al-doped ZnO films deposited by dc magnetron sputtering using various inert gases

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3319357 ◽

2010 ◽

Vol 28 (4) ◽

pp. 895-900 ◽

Cited By ~ 14

Author(s):

Yasushi Sato ◽

Keita Ishihara ◽

Nobuto Oka ◽

Yuzo Shigesato

Keyword(s):

Spatial Distribution ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Inert Gases ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Effects of substrate heating and vacuum annealing on optical and electrical properties of alumina-doped ZnO films deposited by DC magnetron sputtering

10.1117/12.892270 ◽

2011 ◽

Author(s):

Chien-Jen Tang ◽

Chun-Yuan Wang ◽

Cheng-Chung Jaing

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Vacuum Annealing ◽

Zno Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

Substrate Heating ◽

Doped Zno

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Mechanical and Electrical Properties of Ga-Doped ZnO Films Deposited on Flexible Substrate by DC Magnetron Sputtering

Eco-Materials Processing and Design IX - Materials Science Forum ◽

10.4028/0-87849-472-3.185 ◽

2008 ◽

pp. 185-188

Author(s):

Dong Yeop Lee ◽

Jung Rak Lee ◽

Do Geun Kim ◽

Gun Hwan Lee ◽

Young Seok Kim ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Flexible Substrate ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Mechanical And Electrical Properties ◽

Doped Zno

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Microstructural, optical, and electrical properties of Ni–Al co-doped ZnO films prepared by DC magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2013.12.026 ◽

2014 ◽

Vol 51 ◽

pp. 345-350 ◽

Cited By ~ 10

Author(s):

Young Dae Jo ◽

K.N. Hui ◽

K.S. Hui ◽

Y.R. Cho ◽

Kwang Ho Kim

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Zno Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

Doped Zno ◽

Co Doped

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Effects of Energetic Ion Bombardment on Structural and Electrical Properties of Al-Doped ZnO Films Deposited by RF-Superimposed DC Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.071103 ◽

2010 ◽

Vol 49 (7) ◽

pp. 071103 ◽

Cited By ~ 35

Author(s):

Norihiro Ito ◽

Nobuto Oka ◽

Yasusi Sato ◽

Yuzo Shigesato

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Ion Bombardment ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Structural And Electrical Properties ◽

Doped Zno

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Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2012.12213 ◽

2013 ◽

Vol 27 (10) ◽

pp. 1112-1116 ◽

Cited By ~ 2

Author(s):

Ke-Wei SUN ◽

Wan-Cheng ZHOU ◽

Shan-Shan HUANG ◽

Xiu-Feng TANG

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno ◽

Sputtering Pressure

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Process control for low temperature reactive deposition of Al doped ZnO films by ICP-assisted DC magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.207 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 862-866 ◽

Cited By ~ 15

Author(s):

S.J. Jung ◽

B.M. Koo ◽

Y.H. Han ◽

J.J. Lee ◽

J.H. Joo

Keyword(s):

Low Temperature ◽

Process Control ◽

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Reactive Deposition ◽

Doped Zno

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Characterization of AI-doped ZnO Films Deposited by DC Magnetron Sputtering

Journal of the Korean institute of surface engineering ◽

10.5695/jkise.2007.40.3.107 ◽

2007 ◽

Vol 40 (3) ◽

pp. 107-112 ◽

Cited By ~ 3

Author(s):

Yi-Seop Park ◽

Seung-Ho Lee ◽

Pung-Keun Song

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Effect of deposition time on the properties of Al doped ZnO films prepared by DC magnetron sputtering

10.1063/1.4980514 ◽

2017 ◽

Author(s):

Ganesh R. Bhand ◽

Nitu Motwani ◽

Nandu B. Chaure

Keyword(s):

Magnetron Sputtering ◽

Deposition Time ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Influence of oxygen flow rate on the structural, optical and electrical properties of ZnO films grown by DC magnetron sputtering

Applied Physics A ◽

10.1007/s00339-016-9806-3 ◽

2016 ◽

Vol 122 (4) ◽

Cited By ~ 7

Author(s):

Chaya Ravi Gobbiner ◽

Muhammed Ali Avanee Veedu ◽

Dhananjaya Kekuda

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Zno Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering

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