Fluorine clustering and diffusion in silicon: Ab initio calculations and kinetic Monte Carlo model
2010 ◽
Vol 28
(1)
◽
pp. C1G1-C1G6
◽
Keyword(s):
2005 ◽
Vol 237-240
◽
pp. 1129-1134
2005 ◽
Vol 169
(1-3)
◽
pp. 50-53
◽
2011 ◽
Vol 10
(04n05)
◽
pp. 973-977
◽
2000 ◽
Vol 3
(1-2)
◽
pp. 59-63
◽
2020 ◽
Vol 45
(19)
◽
pp. 11158-11166
◽
2007 ◽
Vol 255
(1)
◽
pp. 78-84
◽
Keyword(s):
2013 ◽
Vol 160
(8)
◽
pp. F877-F882
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