Improved characterization of Fourier transform infrared spectra analysis for post-etched ultra-low-κ SiOCH dielectric using chemometric methods
2012 ◽
Vol 52
(12)
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pp. 2627-2636
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2013 ◽
Vol 785-786
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pp. 656-659
2020 ◽
Vol 35
(3)
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pp. 203-215
2017 ◽
Vol 109
(6)
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pp. 813-822
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2006 ◽
Vol 576
(1)
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pp. 130-135
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2011 ◽
Vol 56
(5)
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pp. 944-949
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