Detailed characterization of hydrogen silsesquioxane for e-beam applications in a dynamic random access memory pilot line environment

2009 ◽  
Vol 27 (1) ◽  
pp. 47 ◽  
Author(s):  
K. Keil ◽  
K.-H. Choi ◽  
C. Hohle ◽  
J. Kretz ◽  
L. Szikszai ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Hydrogen Silsesquioxane ◽  
Access Memory ◽  
Detailed Characterization

Reliability and Characterization of Composite Oxide/Nitride Dielectrics for Multi‐Megabit Dynamic Random Access Memory Stacked Capacitors

1991 ◽  
Vol 138 (7) ◽  
pp. 2052-2057 ◽  
Author(s):  
P. C. Fazan ◽  
A. Ditali ◽  
C. H. Dennison ◽  
H. E. Rhodes ◽  
H. C. Chan ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Composite Oxide

Deposition and Electrical Characterization of Very ThinSrTiO3Films for Ultra Large Scale Integrated Dynamic Random Access Memory Application

1995 ◽  
Vol 34 (Part 1, No. 9B) ◽  
pp. 5178-5183 ◽  
Author(s):  
Cheol Seong Hwang ◽  
Soon Oh Park ◽  
Chang Seok Kang ◽  
Hag-Ju Cho ◽  
Ho-Kyu Kang ◽  
...  
Keyword(s):  
Large Scale ◽  
Random Access ◽  
Electrical Characterization ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory

Characterization of the Variable Retention Time in Dynamic Random Access Memory

2011 ◽  
Vol 58 (9) ◽  
pp. 2952-2958 ◽  
Author(s):  
Heesang Kim ◽  
Byoungchan Oh ◽  
Younghwan Son ◽  
Kyungdo Kim ◽  
Seon-Yong Cha ◽  
...  
Keyword(s):  
Retention Time ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Variable Retention

Sub-6F2 Charge Trap Dynamic Random Access Memory Using a Novel Operation Scheme

2006 ◽  
Author(s):  
Zongliang Huo ◽  
Seungjae Baik ◽  
Shieun Kim ◽  
In-seok Yeo ◽  
U-in Chung ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Charge Trap
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