Study of tungsten oxidation in O2∕H2∕N2 downstream plasma

2008 ◽  
Vol 26 (3) ◽  
pp. 360-364 ◽  
Author(s):  
Songlin Xu ◽  
Li Diao
Keyword(s):  
Tungsten Oxidation

Impact of tungsten oxidation conditions on the performance of Al 2 O 3 /WO x -based CBRAM devices

2017 ◽  
Vol 179 ◽  
pp. 56-59 ◽  
Author(s):  
Z. Chen ◽  
A. Belmonte ◽  
C.Y. Chen ◽  
J. Radhakrishnan ◽  
A. Redolfi ◽  
...  
Keyword(s):  
Tungsten Oxidation

Some tungsten oxidation-reduction chemistry: A paint pot titration

1982 ◽  
Vol 59 (8) ◽  
pp. 693
Author(s):  
Miles Pickering ◽  
David L. Monts
Keyword(s):  
Oxidation Reduction ◽  
Tungsten Oxidation

Effect of the tungsten oxidation states in the thermal coloration and bleaching of amorphous WO3 films

2001 ◽  
Vol 384 (2) ◽  
pp. 298-306 ◽  
Author(s):  
G. Leftheriotis ◽  
S. Papaefthimiou ◽  
P. Yianoulis ◽  
A. Siokou
Keyword(s):  
Oxidation States ◽  
Tungsten Oxidation

Tungsten oxidation in the W-Al2O3 system at high temperatures

2010 ◽  
Vol 431 (2) ◽  
pp. 113-115 ◽  
Author(s):  
D. V. Kostomarov ◽  
Kh. S. Bagdasarov ◽  
E. V. Antonov
Keyword(s):  
High Temperatures ◽  
Tungsten Oxidation

Tungsten Oxidation Kinetic after Wet Cleaning: XPS and ToF-SIMS Characterization

2012 ◽  
Vol 187 ◽  
pp. 227-230 ◽  
Author(s):  
Francesco Pipia ◽  
Annamaria Votta ◽  
Enrica Ravizza ◽  
Simona Spadoni ◽  
S. Grasso ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Oxidation Kinetic ◽  
Metal Gates ◽  
Tof Sims ◽  
Tungsten Oxidation ◽  
Scaling Down ◽  
Metal Interfaces

Tungsten importance in semiconductor manufacturing is renewed more and more due to its usage not only as metallization for plugs, but also in metal gates architectures. As the scaling down of the devices is becoming aggressive, the metal interfaces become more critical. Hence, a deeper understanding of the evolution of the W surface after wet cleaning processes is becoming increasingly more important.

Tungsten Oxidation Observed by Pulsed Field Ionization

1977 ◽  
Vol 108 (2) ◽  
pp. 247-258 ◽  
Author(s):  
D. Cocke ◽  
G. Abend ◽  
J. H. Block
Keyword(s):  
Field Ionization ◽  
Pulsed Field ◽  
Tungsten Oxidation ◽  
Pulsed Field Ionization
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