Nanolithographic patterning of transparent, conductive single-walled carbon nanotube films by inductively coupled plasma reactive ion etching

2007 ◽  
Vol 25 (2) ◽  
pp. 348 ◽  
Author(s):  
Ashkan Behnam ◽  
Yongho Choi ◽  
Leila Noriega ◽  
Zhuangchun Wu ◽  
Ivan Kravchenko ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Inductively Coupled ◽  
Nanotube Films

Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching

2013 ◽  
Vol 22 (10) ◽  
pp. 106802
Author(s):  
Bo Wang ◽  
Shi-Chen Su ◽  
Miao He ◽  
Hong Chen ◽  
Wen-Bo Wu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled

Free-Standing Highly Conductive Transparent Ultrathin Single-Walled Carbon Nanotube Films

2010 ◽  
Vol 132 (46) ◽  
pp. 16581-16586 ◽  
Author(s):  
Qingfeng Liu ◽  
Tsuyohiko Fujigaya ◽  
Hui-Ming Cheng ◽  
Naotoshi Nakashima
Keyword(s):  
Carbon Nanotube ◽  
Free Standing ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Nanotube Films

scholarly journals Inductively Coupled Plasma Reactive Ion Etching of AlGaAsSb and InGaAsSb for Quaternary Antimonide MIM Thermophotovoltaics

2002 ◽  
Author(s):  
M. N. Palmisiano ◽  
G. M. Peake ◽  
R. J. Shul ◽  
C. I. Ashby ◽  
J. G. Cederberg ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled

scholarly journals Directly Synthesized Strong, Highly Conducting, Transparent Single-Walled Carbon Nanotube Films

Nano Letters ◽  
2007 ◽  
Vol 7 (8) ◽  
pp. 2307-2311 ◽  
Author(s):  
Wenjun Ma ◽  
Li Song ◽  
Rong Yang ◽  
Taihua Zhang ◽  
Yuanchun Zhao ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Nanotube Films

scholarly journals Load dependent frictional response of vertically aligned single-walled carbon nanotube films

2016 ◽  
Vol 125 ◽  
pp. 63-67 ◽  
Author(s):  
Andrew S. Westover ◽  
Junho Choi ◽  
Kehang Cui ◽  
Takumi Ishikawa ◽  
Taiki Inoue ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Vertically Aligned ◽  
Nanotube Films
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