Synthesis and characterization of inorganic silicon oxycarbide glass thin films by reactive rf-magnetron sputtering

2007 ◽  
Vol 25 (1) ◽  
pp. 153-159 ◽  
Author(s):  
Joseph V. Ryan ◽  
C. G. Pantano
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Silicon Oxycarbide ◽  
Synthesis And Characterization ◽  
Oxycarbide Glass ◽  
Reactive Rf Magnetron Sputtering

scholarly journals HRTEM Microstructural Characterization of β-WO3 Thin Films Deposited by Reactive RF Magnetron Sputtering

Materials ◽  
2017 ◽  
Vol 10 (2) ◽  
pp. 200 ◽  
Author(s):  
A. Faudoa-Arzate ◽  
A. Arteaga-Durán ◽  
R.J. Saenz-Hernández ◽  
M.E. Botello-Zubiate ◽  
P.R. Realyvazquez-Guevara ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Microstructural Characterization ◽  
Rf Magnetron Sputtering ◽  
Wo3 Thin Films ◽  
Reactive Rf Magnetron Sputtering

scholarly journals Synthesis and characterization of dense Gd2Ti2O7 pyrochlore thin films deposited using RF magnetron sputtering

2018 ◽  
Vol 314 ◽  
pp. 36-40
Author(s):  
Cortney R. Kreller ◽  
James A. Valdez ◽  
Terry G. Holesinger ◽  
Rangachary Mukundan ◽  
Eric L. Brosha ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Synthesis And Characterization
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