Effects of Zn content on structural and transparent conducting properties of indium-zinc oxide films grown by rf magnetron sputtering

2006 ◽  
Vol 24 (6) ◽  
pp. 2737 ◽  
Author(s):  
Jae-Soung Park ◽  
Ju-Il Song ◽  
Young-Woo Heo ◽  
Joon-Hyung Lee ◽  
Jeong-Joo Kim ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide ◽  
Transparent Conducting ◽  
Zn Content

Transparent conducting zirconium-doped zinc oxide films prepared by rf magnetron sputtering

2005 ◽  
Vol 252 (5) ◽  
pp. 2006-2011 ◽  
Author(s):  
Maoshui Lv ◽  
Xianwu Xiu ◽  
Zhiyong Pang ◽  
Ying Dai ◽  
Shenghao Han
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Transparent Conducting

Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

2007 ◽  
Vol 253 (6) ◽  
pp. 3345-3348 ◽  
Author(s):  
Xianwu Xiu ◽  
Zhiyong Pang ◽  
Maoshui Lv ◽  
Ying Dai ◽  
Lina Ye ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Transparent Conducting

Influence of Thermal Annealing on Microstructures of Zinc Oxide Films Deposited by RF Magnetron Sputtering

2007 ◽  
Vol 46 (6A) ◽  
pp. 3319-3323 ◽  
Author(s):  
Takahiro Hiramatsu ◽  
Mamoru Furuta ◽  
Hiroshi Furuta ◽  
Tokiyoshi Matsuda ◽  
Takashi Hirao
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Thermal Annealing ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films

Structural studies of zinc oxide films grown by RF magnetron sputtering

2005 ◽  
Vol 148 (1) ◽  
pp. 37-41 ◽  
Author(s):  
I. Sayago ◽  
M. Aleixandre ◽  
A. Martínez ◽  
M.J. Fernández ◽  
J.P. Santos ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Structural Studies ◽  
Zinc Oxide Films

Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

2007 ◽  
Vol 46 (12) ◽  
pp. 7806-7811 ◽  
Author(s):  
Eriko Nishimura ◽  
Tomoko Sasabayashi ◽  
Norihiro Ito ◽  
Yasushi Sato ◽  
Kentaro Utsumi ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide
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