Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas

2006 ◽  
Vol 24 (6) ◽  
pp. 2151-2158 ◽  
Author(s):  
Manabu Edamura ◽  
Eric C. Benck ◽  
Yicheng Wang
Keyword(s):  
Mode Transition ◽  
Inductively Coupled Plasmas ◽  
Time Resolved ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Time Resolved Measurements

scholarly journals The influence of gas pressure on E↔H mode transition in argon inductively coupled plasmas

AIP Advances ◽  
2018 ◽  
Vol 8 (3) ◽  
pp. 035121 ◽  
Author(s):  
Xiao Zhang ◽  
Zhong-kai Zhang ◽  
Jin-xiang Cao ◽  
Yu Liu ◽  
Peng-cheng Yu
Keyword(s):  
Gas Pressure ◽  
Mode Transition ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

2003 ◽  
Vol 10 (4) ◽  
pp. 1146-1151 ◽  
Author(s):  
K. Ostrikov ◽  
E. Tsakadze ◽  
S. Xu ◽  
S. V. Vladimirov ◽  
R. Storer
Keyword(s):  
Electromagnetic Fields ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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