A corrugated disk resonator with eight grooves is proposed for wideband bandpass filter (BPF) design. Due to the spoof localized surface plasmons resonances of the corrugated metallic structure, the dipole, quadrupole, hexapole modes, and a fundamental mode excited by the introduced short-circuited via holes are employed to realize four transmission poles (TPs) in the passband. The theoretical analysis is described by the electric field and current distributions on the resonator. The resonant frequencies can be tuned easily by the parameters of the structure, which can be used to adjust the center frequency and bandwidth of the BPF freely. Furthermore, two resonators are cascaded to obtain eight TPs to improve the selectivity performance. Finally, three fabricated filters demonstrate the design method.
Sidewall Slope Control of InP Via Holes for 3D Integration