Metal-organic chemical-vapor deposition of high-reflectance III-nitride distributed Bragg reflectors on Si substrates

M. A. Mastro; R. T. Holm; N. D. Bassim; D. K. Gaskill; J. C. Culbertson; M. Fatemi; C. R. Eddy; R. L. Henry; M. E. Twigg

doi:10.1116/1.2172937

Metal-organic chemical-vapor deposition of high-reflectance III-nitride distributed Bragg reflectors on Si substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2172937 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1631-1634 ◽

Cited By ~ 6

Author(s):

M. A. Mastro ◽

R. T. Holm ◽

N. D. Bassim ◽

D. K. Gaskill ◽

J. C. Culbertson ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Bragg Reflectors ◽

Distributed Bragg Reflectors ◽

Si Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

High Reflectance

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InP/InGaAlAs distributed Bragg reflectors grown by low-pressure metal organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/s0022-0248(02)02409-0 ◽

2003 ◽

Vol 250 (3-4) ◽

pp. 305-312 ◽

Cited By ~ 3

Author(s):

T.C. Lu ◽

J.Y. Tsai ◽

J.T. Chu ◽

Y.S. Chang ◽

S.C. Wang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Bragg Reflectors ◽

Distributed Bragg Reflectors ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal–organic chemical vapor deposition

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2014.08.003 ◽

2014 ◽

Vol 27 ◽

pp. 841-845 ◽

Cited By ~ 4

Author(s):

Pengcheng Tao ◽

Hongwei Liang ◽

Dongsheng Wang ◽

Xiaochuan Xia ◽

Qiuju Feng ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Bragg Reflectors ◽

Distributed Bragg Reflectors ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Enhanced output power of near-ultraviolet LEDs with AlGaN/GaN distributed Bragg reflectors on 6H–SiC by metal-organic chemical vapor deposition

Superlattices and Microstructures ◽

10.1016/j.spmi.2015.05.035 ◽

2015 ◽

Vol 85 ◽

pp. 482-487 ◽

Cited By ~ 14

Author(s):

Pengcheng Tao ◽

Hongwei Liang ◽

Xiaochuan Xia ◽

Yang Liu ◽

Jianhua Jiang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Output Power ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Bragg Reflectors ◽

Distributed Bragg Reflectors ◽

Near Ultraviolet ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth of epitaxial bismuth ruthenate pyrochlore films on yttria-stabilized zirconia (YSZ) and YSZ-buffered Si substrates by metal–organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2018.10.052 ◽

2019 ◽

Vol 669 ◽

pp. 471-474

Author(s):

Hirokazu Chiba ◽

Rikyu Ikariyama ◽

Shintaro Yasui ◽

Hiroshi Funakubo

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Yttria Stabilized Zirconia ◽

Organic Chemical ◽

Stabilized Zirconia ◽

Si Substrates ◽

Bismuth Ruthenate ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr,Ti)O3films grown on (100) Si substrates by metal organic chemical vapor deposition

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.10pf12 ◽

2017 ◽

Vol 56 (10S) ◽

pp. 10PF12 ◽

Cited By ~ 2

Author(s):

Shoji Okamoto ◽

P. S. Sankara Rama Krishnan ◽

Satoshi Okamoto ◽

Shintaro Yokoyama ◽

Kensuke Akiyama ◽

...

Keyword(s):

Crystal Structure ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Plane Orientation ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Dysprosium Scandate Thin Films Prepared by Metal Organic Chemical Vapor Deposition on Pt/TiOx/SiO2/Si Substrates for MIM Capacitor Applications.

ECS Transactions ◽

10.1149/1.2779588 ◽

2019 ◽

Vol 11 (4) ◽

pp. 529-540 ◽

Cited By ~ 4

Author(s):

Reji Thomas ◽

Naba K. Karan ◽

Peter Ehrhart ◽

Rainer Waser ◽

Ram S Katiyar

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Dysprosium Scandate Thin Films Prepared by Metal Organic Chemical Vapor Deposition on Pt/Ti/SiO2/Si Substrates for MIM Capacitor Applications.

ECS Meeting Abstracts ◽

10.1149/ma2007-02/20/1151 ◽

2007 ◽

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth and Characterization of Crack-Free Semi-Polar (1-101) GaN on 7°-off (001) Si Substrates by Metal-Organic Chemical Vapor Deposition

ECS Journal of Solid State Science and Technology ◽

10.1149/2.001308jss ◽

2013 ◽

Vol 2 (8) ◽

pp. N3001-N3005 ◽

Cited By ~ 4

Author(s):

Hsueh-Hsing Liu ◽

Hsien-Yu Lin ◽

Chen-Zi Liao ◽

Jen-Inn Chyi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Epitaxial growth of CdTe films on GaAs-buffered (001) Si substrates by metal organic chemical vapor deposition

Materials Letters ◽

10.1016/j.matlet.2012.07.070 ◽

2012 ◽

Vol 87 ◽

pp. 139-141 ◽

Cited By ~ 3

Author(s):

Kwang-Chon Kim ◽

Seung Hyub Baek ◽

Won Chel Choi ◽

Hyun Jae Kim ◽

Jin Dong Song ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Metal Organic ◽

Cdte Films ◽

Organic Chemical Vapor Deposition

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Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams

Journal of Materials Science ◽

10.1007/s10853-006-7868-x ◽

2006 ◽

Vol 41 (9) ◽

pp. 2667-2671 ◽

Cited By ~ 6

Author(s):

M. Tanaka ◽

F. Chu ◽

M. Shimojo ◽

M. Takeguchi ◽

K. Mitsuishi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Electron Beams ◽

Iron Silicide ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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