Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2O3–ZrO2 thin films

D. H. Trinh; H. Högberg; J. M. Andersson; M. Collin; I. Reineck; U. Helmersson; L. Hultman

doi:10.1116/1.2171709

Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2O3–ZrO2 thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2171709 ◽

2006 ◽

Vol 24 (2) ◽

pp. 309-316 ◽

Cited By ~ 24

Author(s):

D. H. Trinh ◽

H. Högberg ◽

J. M. Andersson ◽

M. Collin ◽

I. Reineck ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Sputtering Deposition

Download Full-text

Synthesis and characterization of Cu2CoSnS4 thin films prepared via radio-frequency (RF) magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-018-0499-6 ◽

2018 ◽

Vol 30 (3) ◽

pp. 2285-2291 ◽

Cited By ~ 1

Author(s):

Ting Wang ◽

Qingfeng Zhan ◽

Wenjuan Cheng

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Rf Magnetron Sputtering ◽

Synthesis And Characterization

Download Full-text

Preparation and Characterization of 70TeO2-30WO3 Glass Thin Films by Radio-Frequency Magnetron Sputtering Method

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.487 ◽

2007 ◽

pp. 487-490

Author(s):

Jin Hyeok Kim ◽

Ki Young Yoo ◽

Sang Hoon Shin ◽

Sun Hyun Youn ◽

Jong Ha Moon

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Characterization of (Ba,Sr)TiO[sub 3] Thin Films on BaPbO[sub 3] Electrode Prepared by Radio Frequency Magnetron Sputtering

Journal of The Electrochemical Society ◽

10.1149/1.2120307 ◽

2005 ◽

Vol 152 (12) ◽

pp. F213 ◽

Cited By ~ 5

Author(s):

Chun-Sheng Liang ◽

Jenn-Ming Wu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Characterization of (Pb1-xLax)TiO3 thin films grown by radio-frequency magnetron sputtering and their electrical properties

Integrated Ferroelectrics ◽

10.1080/10584589508012264 ◽

1995 ◽

Vol 10 (1-4) ◽

pp. 63-72 ◽

Cited By ~ 11

Author(s):

Su-Jin Chae ◽

Sang-Shik Park ◽

Soon-Gil Yoon ◽

Won-Jae Lee ◽

Ho-Gi Kim

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films

Thin Solid Films ◽

10.1016/j.tsf.2011.08.038 ◽

2012 ◽

Vol 520 (6) ◽

pp. 1698-1704 ◽

Cited By ~ 12

Author(s):

Nanke Jiang ◽

Daniel G. Georgiev ◽

Ting Wen ◽

Ahalapitiya H. Jayatissa

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Sputtering Deposition ◽

Radio Frequency Sputtering ◽

Zinc Nitride

Download Full-text

Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1−xNb2O6)

Journal of Applied Physics ◽

10.1063/1.1535749 ◽

2003 ◽

Vol 93 (3) ◽

pp. 1718-1724 ◽

Cited By ~ 24

Author(s):

M. Cuniot-Ponsard ◽

J. M. Desvignes ◽

B. Ea-Kim ◽

E. Leroy

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Strontium Barium Niobate ◽

Strontium Barium ◽

Sputtering Deposition

Download Full-text

Characterization of Ferroelectric SrBi2Ta2 O 9 Thin Films Deposited by a Radio Frequency Magnetron Sputtering Technique

Journal of The Electrochemical Society ◽

10.1149/1.1837907 ◽

1997 ◽

Vol 144 (8) ◽

pp. 2855-2858 ◽

Cited By ~ 28

Author(s):

Sang‐Shik Park ◽

Cheol‐Hoon Yang ◽

Soon‐Gil Yoon ◽

Jun‐Hyung Ahn ◽

Ho‐Gi Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

The characterization of Cu-doped ZnO thin films prepared by using radio-frequency reactive magnetron sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.70.856 ◽

2017 ◽

Vol 70 (9) ◽

pp. 856-860 ◽

Cited By ~ 1

Author(s):

Chaoqun Cai ◽

Hongqiang Zhang ◽

Jun Xie ◽

Ligang Ma

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Doped Zno

Download Full-text

Characterization of amorphous p-type transparent CuFeO2 thin films prepared by radio frequency magnetron sputtering method at room temperature

Thin Solid Films ◽

10.1016/j.tsf.2015.04.066 ◽

2015 ◽

Vol 589 ◽

pp. 17-21 ◽

Cited By ~ 12

Author(s):

Zanhong Deng ◽

Xiaodong Fang ◽

Xi Wang ◽

Suzhen Wu ◽

Weiwei Dong ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

P Type

Download Full-text

Characterization of CuInS2 Thin Films Deposited by Radio-Frequency Magnetron Sputtering from Nanoparticles Synthesized by Solvothermal Route

Sensor Letters ◽

10.1166/sl.2011.1791 ◽

2011 ◽

Vol 9 (6) ◽

pp. 2186-2189 ◽

Cited By ~ 3

Author(s):

F. Ghribi ◽

L. El Mir ◽

H. Dahman ◽

Z. Ben Ayadi ◽

K. Djessas ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Solvothermal Route ◽

Cuins2 Thin Films

Download Full-text