High-resolution three-dimensional reconstruction: A combined scanning electron microscope and focused ion-beam approach

Author(s):  
R. K. Bansal ◽  
A. Kubis ◽  
R. Hull ◽  
J. M. Fitz-Gerald
Author(s):  
Becky Holdford

Abstract On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).


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