Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas:Ex situspectroscopic ellipsometry and Monte Carlo simulation study

2006 ◽  
Vol 24 (1) ◽  
pp. 45-54 ◽  
Author(s):  
A. Amassian ◽  
P. Desjardins ◽  
L. Martinu
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