Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas:Ex situspectroscopic ellipsometry and Monte Carlo simulation study
2006 ◽
Vol 24
(1)
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pp. 45-54
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2008 ◽
Vol 32
(2)
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pp. 63-68
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2021 ◽
Vol 574
◽
pp. 126014
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