Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

2005 ◽  
Vol 23 (6) ◽  
pp. 3075 ◽  
Author(s):  
J. Thiault ◽  
J. Foucher ◽  
J. H. Tortai ◽  
O. Joubert ◽  
S. Landis ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Three Dimensional ◽  
Line Edge Roughness ◽  
Atomic Force ◽  
Edge Roughness

Observation of Si Pattern Sidewall Using Inclination Atomic Force Microscope for Evaluation of Line Edge Roughness

2010 ◽  
Vol 10 (7) ◽  
pp. 4522-4527 ◽  
Author(s):  
Sumio Hosaka ◽  
Hirokazu Koyabu ◽  
Masamichi Noro ◽  
Katsuyuki Takizawa ◽  
Hayato Sone ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Line Edge Roughness ◽  
Atomic Force ◽  
Edge Roughness

scholarly journals True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor

Sensors ◽  
2021 ◽  
Vol 22 (1) ◽  
pp. 314
Author(s):  
Jan Thiesler ◽  
Thomas Ahbe ◽  
Rainer Tutsch ◽  
Gaoliang Dai
Keyword(s):  
Three Dimensional ◽  
Critical Dimension ◽  
Selectivity Ratio ◽  
Line Edge Roughness ◽  
Long Term Stability ◽  
Atomic Force ◽  
Edge Roughness ◽  
Spatial Dimensions ◽  
Optical Lever

State of the art three-dimensional atomic force microscopes (3D-AFM) cannot measure three spatial dimensions separately from each other. A 3D-AFM-head with true 3D-probing capabilities is presented in this paper. It detects the so-called 3D-Nanoprobes CD-tip displacement with a differential interferometer and an optical lever. The 3D-Nanoprobe was specifically developed for tactile 3D-probing and is applied for critical dimension (CD) measurements. A calibrated 3D-Nanoprobe shows a selectivity ratio of 50:1 on average for each of the spatial directions x, y, and z. Typical stiffness values are kx = 1.722 ± 0.083 N/m, ky = 1.511 ± 0.034 N/m, and kz = 1.64 ± 0.16 N/m resulting in a quasi-isotropic ratio of the stiffness of 1.1:0.9:1.0 in x:y:z, respectively. The probing repeatability of the developed true 3D-AFM shows a standard deviation of 0.18 nm, 0.31 nm, and 0.83 nm for x, y, and z, respectively. Two CD-line samples type IVPS100-PTB, which were perpendicularly mounted to each other, were used to test the performance of the developed true 3D-AFM: repeatability, long-term stability, pitch, and line edge roughness and linewidth roughness (LER/LWR), showing promising results.

Characterization of photosystem II with the atomic-force microscope

1992 ◽  
Vol 50 (2) ◽  
pp. 1146-1147
Author(s):  
Kathleen M. Marr ◽  
Mary K. Lyon
Keyword(s):  
Photosystem Ii ◽  
Atomic Force Microscope ◽  
Three Dimensional ◽  
Biologically Active ◽  
Atomic Force ◽  
Freeze Etching ◽  
Image Averaging ◽  
Oxygen Evolving ◽  
Averaging Techniques

Photosystem II (PSII) is different from all other reaction centers in that it splits water to evolve oxygen and hydrogen ions. This unique ability to evolve oxygen is partly due to three oxygen evolving polypeptides (OEPs) associated with the PSII complex. Freeze etching on grana derived insideout membranes revealed that the OEPs contribute to the observed tetrameric nature of the PSIl particle; when the OEPs are removed, a distinct dimer emerges. Thus, the surface of the PSII complex changes dramatically upon removal of these polypeptides. The atomic force microscope (AFM) is ideal for examining surface topography. The instrument provides a topographical view of individual PSII complexes, giving relatively high resolution three-dimensional information without image averaging techniques. In addition, the use of a fluid cell allows a biologically active sample to be maintained under fully hydrated and physiologically buffered conditions. The OEPs associated with PSII may be sequentially removed, thereby changing the surface of the complex by one polypeptide at a time.

The Nano Membrane-Like Structure of the Precambrian Microfossils under Atomic Force Microscope (AFM)

2007 ◽  
Vol 121-123 ◽  
pp. 739-742 ◽  
Author(s):  
H.M. Chi ◽  
Z.D. Xiao ◽  
Xin Xing Xiao
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Atomic Force Microscope ◽  
Early Life ◽  
Three Dimensional ◽  
New Method ◽  
Subcellular Structure ◽  
Atomic Force ◽  
Fossil Embryos ◽  
Scanning Electron

Weng`an fauna in Guizhou, China provides a unique window for the evolution of the early life especially since the animal embryos and sponge is found there. Phosphatization makes the fossils preserve in details including cells and subcellular structure. Here we use atomic force microscope observing the surface of some three dimensional preserved embryo fossils and the ultra membrane-like structure is found under atomic force microscope (AFM) while such structure can`t be found under scanning electron microscope (SEM). The membrane-like structure is approximately 10nm in thickness which maybe one part of the fossil embryos or belong to another nano scale microfossils. Therefore, AFM provides a new method for the study of the ultra structure of the microfossils from Weng`an fauna.

Machining Complex Three-Dimensional Nanostructures With an Atomic Force Microscope Through the Frequency Control of the Tip Reciprocating Motions

2016 ◽  
Vol 138 (12) ◽  
Author(s):  
Yanquan Geng ◽  
Yongda Yan ◽  
Emmanuel Brousseau ◽  
Xing Cui ◽  
Bowen Yu ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Force Feedback ◽  
Normal Load ◽  
Frequency Control ◽  
Three Dimensional ◽  
Atomic Force ◽  
Combined Control ◽  
Novel Method ◽  
Lateral Displacements ◽  
Floor Surfaces

A novel method relying on atomic force microscope (AFM) tip based nanomachining is presented to enable the fabrication of microchannels that exhibit complex three-dimensional (3D) nanoscale floor surface geometries. To achieve this, reciprocating lateral displacements of the tip of an AFM probe are generated, while a high-precision stage is also actuated to move in a direction perpendicular to such tip motions. The width and length of microchannels machined in this way are determined by the amplitude of the tip motion and the stage displacement, respectively. Thus, the processing feed can be changed during the process as it is defined by the combined control of the frequency of the tip reciprocating motions and the stage speed. By employing the built-in force feedback loop of conventional AFM systems during such operations, the variation of the feed leads to different machined depths. Thus, this results in the capability to generate complex 3D nanostructures, even for a given normal load, which is set by the AFM user prior to the start of the process. In this paper, the fabrication of different microchannels with floor surfaces following half triangular, triangular, sinusoidal, and top-hat waveforms is demonstrated. It is anticipated that this method could be employed to fabricate complex nanostructures more readily compared to traditional vacuum-based lithography processes.

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