Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films

Pushkar Jain; Jasbir S. Juneja; Vinay Bhagwat; Eugene J. Rymaszewski; Toh-Ming Lu; Timothy S. Cale

doi:10.1116/1.1897700

Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1897700 ◽

2005 ◽

Vol 23 (3) ◽

pp. 512-519 ◽

Cited By ~ 10

Author(s):

Pushkar Jain ◽

Jasbir S. Juneja ◽

Vinay Bhagwat ◽

Eugene J. Rymaszewski ◽

Toh-Ming Lu ◽

...

Keyword(s):

Substrate Temperature ◽

Tantalum Oxide ◽

Oxide Films ◽

Pulsed Dc

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Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Applied Surface Science ◽

10.1016/j.apsusc.2007.08.005 ◽

2008 ◽

Vol 254 (7) ◽

pp. 1953-1960 ◽

Cited By ~ 53

Author(s):

S.V. Jagadeesh Chandra ◽

S. Uthanna ◽

G. Mohan Rao

Keyword(s):

Electrical Properties ◽

Substrate Temperature ◽

Tantalum Oxide ◽

Oxide Films ◽

Optical And Electrical Properties

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Reduction of dielectric loss of sputtered tantalum oxide films

Proceedings of 1998 International Symposium on Electrical Insulating Materials. 1998 Asian International Conference on Dielectrics and Electrical Insulation. 30th Symposium on Electrical Insulating Materials (IEEE Cat. No.98TH8286) ◽

10.1109/iseim.1998.741683 ◽

2002 ◽

Author(s):

K. Maki ◽

E. Itoh ◽

K. Miyairi

Keyword(s):

Dielectric Loss ◽

Tantalum Oxide ◽

Oxide Films

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Effects of oxygen addition on enhancing electrochromic performance of flexible tungsten/tantalum oxide films using an atmospheric pressure plasma jet

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2013.02.001 ◽

2013 ◽

Vol 221 ◽

pp. 173-181 ◽

Cited By ~ 6

Author(s):

Yung-Sen Lin ◽

Yen-Cheng Chen ◽

Shih-Wei Tien

Keyword(s):

Atmospheric Pressure ◽

Tantalum Oxide ◽

Oxide Films ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma ◽

Oxygen Addition

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Electrical characterisation of RF sputtered tantalum oxide films rapid thermal annealed with Ar, N2, O2 and N2O

Thin Solid Films ◽

10.1016/s0040-6090(98)01622-8 ◽

1999 ◽

Vol 343-344 ◽

pp. 105-107 ◽

Cited By ~ 7

Author(s):

W.K. Choi ◽

L.S. Tan ◽

J.Y. Lim ◽

S.G. Pek

Keyword(s):

Tantalum Oxide ◽

Oxide Films

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DETERMINATION OF TRACE IMPURITIES IN TANTALUM OXIDE FILMS BY INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY COMBINED WITH ION EXCHANGE

Analytical Sciences ◽

10.2116/analsci.7.supple_1247 ◽

1991 ◽

Vol 7 (Supple) ◽

pp. 1247-1248

Author(s):

SHOJI KOZUKA ◽

BIDEKI MATSUNAGA

Keyword(s):

Mass Spectrometry ◽

Ion Exchange ◽

Inductively Coupled Plasma ◽

Tantalum Oxide ◽

Oxide Films ◽

Trace Impurities ◽

Inductively Coupled ◽

Plasma Mass Spectrometry

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Pores in Tantalum Oxide Films and Their Influence on the Photoresponse

Journal of The Electrochemical Society ◽

10.1149/1.2426150 ◽

1964 ◽

Vol 111 (4) ◽

pp. 453 ◽

Cited By ~ 2

Author(s):

R. Dreiner ◽

J. Schimmel

Keyword(s):

Tantalum Oxide ◽

Oxide Films

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Ion beam and dual ion beam sputter deposition of tantalum oxide films

10.1117/12.192101 ◽

1994 ◽

Author(s):

Mirza Cevro ◽

George Carter

Keyword(s):

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Sputter Deposition ◽

Ion Beam Sputter Deposition

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Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering

2008 IEEE PhotonicsGlobal@Singapore ◽

10.1109/ipgc.2008.4781359 ◽

2008 ◽

Author(s):

K. Miura ◽

H. Miyazaki ◽

O. Hanaizumi

Keyword(s):

Radio Frequency ◽

Blue Light ◽

Tantalum Oxide ◽

Oxide Films ◽

Light Emitting ◽

Radio Frequency Sputtering

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Photoluminescence Properties of Thulium and Cerium Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering

Materials Sciences and Applications ◽

10.4236/msa.2015.64031 ◽

2015 ◽

Vol 06 (04) ◽

pp. 263-268 ◽

Cited By ~ 4

Author(s):

Kenta Miura ◽

Takumi Osawa ◽

Yuya Yokota ◽

Tetsuhito Suzuki ◽

Osamu Hanaizumi

Keyword(s):

Radio Frequency ◽

Tantalum Oxide ◽

Oxide Films ◽

Photoluminescence Properties ◽

Co Doped

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