Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature

Marcus A. Worsley; Stacey F. Bent; Stephen M. Gates; Nicholas C. M. Fuller; Willi Volksen; Michelle Steen; Timothy Dalton

doi:10.1116/1.1861038

Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1861038 ◽

2005 ◽

Vol 23 (2) ◽

pp. 395 ◽

Cited By ~ 76

Author(s):

Marcus A. Worsley ◽

Stacey F. Bent ◽

Stephen M. Gates ◽

Nicholas C. M. Fuller ◽

Willi Volksen ◽

...

Keyword(s):

Plasma Chemistry ◽

Plasma Interactions

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Material Structure of Microcrystalline Silicon Deposited with an Expanding Thermal Plasma

MRS Proceedings ◽

10.1557/proc-762-a.15.3 ◽

2003 ◽

Vol 762 ◽

Cited By ~ 2

Author(s):

C. Smit ◽

D.L. Williamson ◽

M.C.M. van de Sanden ◽

R.A.C.M.M. van Swaaij

Keyword(s):

Thermal Plasma ◽

Hydrogen Plasma ◽

Plasma Chemistry ◽

Plasma Source ◽

Growth Direction ◽

Interaction Time ◽

Material Structure ◽

Average Particle ◽

Microcrystalline Silicon ◽

X Ray

AbstractExpanding thermal plasma CVD (ETP CVD) has been used to deposit thin microcrystalline silicon films. In this study we varied the position at which the silane is injected in the expanding hydrogen plasma: relatively far from the substrate and close to the plasma source, giving a long interaction time of the plasma with the silane, and close to the substrate, resulting in a short interaction time. The material structure is studied extensively. The crystalline fractions as obtained from Raman spectroscopy as well as from X-ray diffraction (XRD) vary from 0 to 67%. The average particle sizes vary from 6 to 17 nm as estimated from the (111) XRD peak using the Scherrer formula. Small angle X-ray scattering (SAXS) and flotation density measurements indicate void volume fractions of about 4 to 6%. When the samples are tilted the SAXS signal is lower than for the untilted case, indicating elongated objects parallel to the growth direction in the films. We show that the material properties are influenced by the position of silane injection in the reactor, indicating a change in the plasma chemistry.

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