Preparation of highly textured Mo and AlN films using a Ti seed layer for integrated high-Q film bulk acoustic resonators

2004 ◽  
Vol 22 (3) ◽  
pp. 1127 ◽  
Author(s):  
Hee-Chul Lee ◽  
Jae-Young Park ◽  
Kyung-Hak Lee ◽  
Jong-Uk Bu
Keyword(s):  
Seed Layer ◽  
Acoustic Resonators ◽  
High Q ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Intrinsically switchable, high-Q ferroelectric-on-silicon composite film bulk acoustic resonators

2014 ◽  
Vol 61 (2) ◽  
pp. 231-238 ◽  
Author(s):  
Seyit Ahmet Sis ◽  
Seungku Lee ◽  
Victor Lee ◽  
Adrian K. Bayraktaroglu ◽  
Jamie D. Phillips ◽  
...  
Keyword(s):  
Composite Film ◽  
Acoustic Resonators ◽  
High Q ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators

2008 ◽  
Vol 47 (5) ◽  
pp. 4007-4010 ◽  
Author(s):  
Masanori Ueda ◽  
Motoaki Hara ◽  
Shinji Taniguchi ◽  
Tsuyoshi Yokoyama ◽  
Tokihiro Nishihara ◽  
...  
Keyword(s):  
Air Gap ◽  
Acoustic Resonators ◽  
Band Filter ◽  
X Band ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

scholarly journals High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators

2009 ◽  
Vol 94 (17) ◽  
pp. 172903 ◽  
Author(s):  
N. Yamauchi ◽  
T. Shirai ◽  
T. Yoshihara ◽  
Y. Hayasaki ◽  
T. Ueda ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Resonators ◽  
Piezoelectric Thin Films ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk
Sign in / Sign up

Export Citation Format

Share Document