Facet evolution in selective epitaxial growth of Si by cold-wall ultrahigh vacuum chemical vapor deposition

2004 ◽  
Vol 22 (2) ◽  
pp. 682 ◽  
Author(s):  
Seung-Hyun Lim ◽  
Sukchan Song ◽  
Gun-Do Lee ◽  
Euijoon Yoon ◽  
Jong-Ho Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Cold Wall ◽  
Selective Epitaxial Growth

Selective Epitaxial Growth by Ultrahigh-Vacuum Chemical Vapor Deposition with Alternating Gas Supply of Si2H6and Cl2

2000 ◽  
Vol 39 (Part 1, No. 11) ◽  
pp. 6139-6142 ◽  
Author(s):  
Shigemitsu Maruno ◽  
Takumi Nakahata ◽  
Taisuke Furukawa ◽  
Yasunori Tokuda ◽  
Shinichi Satoh ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Selective Epitaxial Growth ◽  
Gas Supply

Selective Epitaxial Growth of Si and Si1-xGexFilms by Ultrahigh-Vacuum Chemical Vapor Deposition Using Si2H6and GeH4

1992 ◽  
Vol 31 (Part 1, No. 5A) ◽  
pp. 1432-1435 ◽  
Author(s):  
Ken-ichi Aketagawa ◽  
Toru Tatsumi ◽  
Masayuki Hiroi ◽  
Taeko Niino ◽  
Junro Sakai
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Selective Epitaxial Growth

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 240-246 ◽  
Author(s):  
Tz-Guei Jung ◽  
Chun-Yen Chang ◽  
Ting-Chang Chang ◽  
Horng-Chih Lin ◽  
Tom Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Germanium Alloy
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