Compositional effects on electrical and mechanical properties in carbon-doped oxide dielectric films: Application of Fourier-transform infrared spectroscopy
2004 ◽
Vol 22
(1)
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pp. 196
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2010 ◽
Vol 129-131
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pp. 837-841
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2015 ◽
Vol 07
(2)
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2005 ◽
pp. 1-77
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2018 ◽
Vol 37
(23)
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pp. 1402-1417
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2005 ◽
Vol 23
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pp. 433
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1990 ◽
Vol 30
(24)
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pp. 1595-1598
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