Influence of the high-temperature “firing” step on high-rate plasma deposited silicon nitride films used as bulk passivating antireflection coatings on silicon solar cells

Author(s):  
J. Hong ◽  
W. M. M. Kessels ◽  
W. J. Soppe ◽  
A. W. Weeber ◽  
W. M. Arnoldbik ◽  
...  
2003 ◽  
Vol 11 (2) ◽  
pp. 125-130 ◽  
Author(s):  
J. Hong ◽  
W. M. M. Kessels ◽  
F. J. H. van Assche ◽  
H. C. Rieffe ◽  
W. J. Soppe ◽  
...  

2014 ◽  
Vol 104 (5) ◽  
pp. 053503 ◽  
Author(s):  
Vivek Sharma ◽  
Clarence Tracy ◽  
Dieter Schroder ◽  
Stanislau Herasimenka ◽  
William Dauksher ◽  
...  

2018 ◽  
Vol 55 (6) ◽  
pp. 061602
Author(s):  
马新尖 Ma Xinjian ◽  
司志华 Si Zhihua ◽  
杨东 Yang Dong ◽  
林涛 Lin Tao ◽  
冯帅臣 Feng Shuaichen

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