A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Deuk Yeon Lee; Se-Jong Lee; Kie Moon Song; Hong Koo Baik

doi:10.1116/1.1584038

A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1584038 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1069-1072 ◽

Cited By ~ 9

Author(s):

Deuk Yeon Lee ◽

Se-Jong Lee ◽

Kie Moon Song ◽

Hong Koo Baik

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(96)09311-x ◽

1997 ◽

Vol 298 (1-2) ◽

pp. 221-227 ◽

Cited By ~ 82

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films deposited on polyethylene naphthalate substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.10.016 ◽

2009 ◽

Vol 517 (8) ◽

pp. 2596-2601 ◽

Cited By ~ 21

Author(s):

M.G. Sandoval-Paz ◽

R. Ramírez-Bon

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Polyethylene Naphthalate ◽

Tin Oxide Films

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Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1566789 ◽

2003 ◽

Vol 21 (3) ◽

pp. 745-751 ◽

Cited By ~ 57

Author(s):

P. F. Carcia ◽

R. S. McLean ◽

M. H. Reilly ◽

Z. G. Li ◽

L. J. Pillione ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Preparation of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Journal of Wuhan University of Technology-Mater Sci Ed ◽

10.1007/bf02841274 ◽

2005 ◽

Vol 20 (4) ◽

pp. 22-25 ◽

Cited By ~ 2

Author(s):

Liu Jing ◽

Gong Jian ◽

Gu Zhen'an

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene napthalate substrates deposited by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.12.146 ◽

2008 ◽

Vol 516 (12) ◽

pp. 4064-4069 ◽

Cited By ~ 13

Author(s):

S.K. Bhagat ◽

H. Han ◽

Y. Zoo ◽

J. Lewis ◽

S. Grego ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Deposition Parameters ◽

Tin Oxide Films

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Effect of tin doping on the properties of indium-tin-oxide films deposited by radio frequency magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2007.01.025 ◽

2007 ◽

Vol 138 (3) ◽

pp. 271-276 ◽

Cited By ~ 5

Author(s):

Chih-Hao Yang ◽

Shih-Chin Lee ◽

Tien-Chai Lin ◽

Wen-Yan Zhuang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature

Thin Solid Films ◽

10.1016/s0040-6090(00)01418-8 ◽

2000 ◽

Vol 376 (1-2) ◽

pp. 255-263 ◽

Cited By ~ 88

Author(s):

Keran Zhang ◽

Furong Zhu ◽

C.H.A Huan ◽

A.T.S Wee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Processing Temperature ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Radio frequency-H 2 O plasma treatment on indium tin oxide films produced by electron beam and radio frequency magnetron sputtering methods

Thin Solid Films ◽

10.1016/j.tsf.2014.07.035 ◽

2014 ◽

Vol 567 ◽

pp. 32-37 ◽

Cited By ~ 10

Author(s):

Melek Kiristi ◽

Ali Gulec ◽

Ferhat Bozduman ◽

Lutfi Oksuz ◽

Aysegul Uygun Oksuz ◽

...

Keyword(s):

Electron Beam ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Plasma Treatment ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Cited By ~ 54

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Characterization of zinc–tin–oxide films deposited by radio frequency magnetron sputtering at various substrate temperatures

Thin Solid Films ◽

10.1016/j.tsf.2013.08.067 ◽

2013 ◽

Vol 548 ◽

pp. 385-388 ◽

Cited By ~ 8

Author(s):

Ik-Jae Lee ◽

Nark-Eon Sung ◽

Keun Hwa Chae ◽

Ray Conley

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Tin Oxide ◽

Substrate Temperatures ◽

Tin Oxide Films

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