Molecular dynamics simulation of ion bombardment on hydrogen terminated Si(001)2×1 surface

Koji Satake; David B. Graves

doi:10.1116/1.1554939

Molecular dynamics simulation of ion bombardment on hydrogen terminated Si(001)2×1 surface

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1554939 ◽

2003 ◽

Vol 21 (2) ◽

pp. 484-490 ◽

Cited By ~ 12

Author(s):

Koji Satake ◽

David B. Graves

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Bombardment ◽

Dynamics Simulation

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Molecular-dynamics simulation of adatom formation under keV-ion bombardment of Pt(111)

Physical Review B ◽

10.1103/physrevb.50.11167 ◽

1994 ◽

Vol 50 (15) ◽

pp. 11167-11174 ◽

Cited By ~ 61

Author(s):

Heinrich Gades ◽

Herbert M. Urbassek

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Bombardment ◽

Dynamics Simulation

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Molecular dynamics simulation of energetic ion bombardment onto a-Si3N4 surfaces

Journal of Crystal Growth ◽

10.1016/s0022-0248(01)01336-7 ◽

2001 ◽

Vol 230 (1-2) ◽

pp. 285-290 ◽

Cited By ~ 4

Author(s):

Dong Ho Kim ◽

Do Hyun Kim ◽

Kyu Sang Lee

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Bombardment ◽

Dynamics Simulation

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Molecular dynamics simulation on selective etching of α -quartz and amorphous quartz substrate using low-energy argon ion bombardment model in dry etching process

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.14.3.033505 ◽

2015 ◽

Vol 14 (3) ◽

pp. 033505 ◽

Cited By ~ 1

Author(s):

Abdul Haadi Abdul Manap ◽

Khairudin Mohamed

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Quartz Substrate ◽

Ion Bombardment ◽

Dry Etching ◽

Low Energy ◽

Dynamics Simulation ◽

Argon Ion Bombardment ◽

Amorphous Quartz ◽

Argon Ion

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Molecular dynamics simulation of mass transport processes in a Ni crystal with Al atoms as impurity under low energy ion bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(00)00424-9 ◽

2001 ◽

Vol 173 (4) ◽

pp. 417-426 ◽

Cited By ~ 2

Author(s):

G.V Kornich ◽

G Betz ◽

A.I Bazhin

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Mass Transport ◽

Ion Bombardment ◽

Transport Processes ◽

Low Energy ◽

Dynamics Simulation

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Molecular dynamics simulation of bipartite bimetallic clusters under low-energy argon ion bombardment

Physics of the Solid State ◽

10.1134/s1063783416020281 ◽

2016 ◽

Vol 58 (2) ◽

pp. 387-393 ◽

Cited By ~ 6

Author(s):

D. V. Shirokorad ◽

G. V. Kornich ◽

S. G. Buga

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Bombardment ◽

Low Energy ◽

Dynamics Simulation ◽

Bimetallic Clusters ◽

Argon Ion Bombardment ◽

Argon Ion

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Molecular dynamics simulation of the ion bombardment of interlayer Cu13 clusters in graphite

Bulletin of the Russian Academy of Sciences Physics ◽

10.3103/s1062873812050103 ◽

2012 ◽

Vol 76 (5) ◽

pp. 523-526

Author(s):

O. A. Yermolenko ◽

G. V. Kornich

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Bombardment ◽

Dynamics Simulation

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Molecular dynamics simulation of defect formation in an aluminum crystal under low-energy ion bombardment

Physics of the Solid State ◽

10.1134/1.1340181 ◽

2001 ◽

Vol 43 (1) ◽

pp. 29-34 ◽

Cited By ~ 1

Author(s):

G. V. Kornich ◽

G. Betz ◽

A. I. Bazhin

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Defect Formation ◽

Ion Bombardment ◽

Low Energy ◽

Dynamics Simulation ◽

Aluminum Crystal

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Plasma sputtering of silicon dioxide substrate by low energy Ar ion bombardment: molecular dynamics simulation

Journal of Crystal Growth ◽

10.1016/s0022-0248(01)01905-4 ◽

2002 ◽

Vol 237-239 ◽

pp. 217-222 ◽

Cited By ~ 5

Author(s):

Dong Ho Kim ◽

Seung Yup Lee ◽

Do Hyun Kim

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Silicon Dioxide ◽

Ion Bombardment ◽

Low Energy ◽

Dynamics Simulation ◽

Plasma Sputtering

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Mechanism for anisotropic ejection of atoms from fcc (100) metal surface by low-energy argon ion bombardment: Molecular dynamics simulation

Vacuum ◽

10.1016/j.vacuum.2021.110524 ◽

2021 ◽

Vol 193 ◽

pp. 110524

Author(s):

Guo Zhu ◽

Wenyu Liu ◽

Zhiyin Gan ◽

Baijun Xiao

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Metal Surface ◽

Ion Bombardment ◽

Low Energy ◽

Dynamics Simulation ◽

Argon Ion Bombardment ◽

Argon Ion

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Molecular dynamics simulation of atom ejection from the (0001) surface of single crystal zirconium due to keV ion bombardment

The Journal of Chemical Physics ◽

10.1063/1.470347 ◽

1995 ◽

Vol 103 (16) ◽

pp. 7187-7196 ◽

Cited By ~ 3

Author(s):

Aijun Li ◽

Robert O. Watts

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Single Crystal ◽

Ion Bombardment ◽

Dynamics Simulation

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