Effect of annealing temperature on the electron emission characteristics of silicon tips coated with Ba[sub 0.67]Sr[sub 0.33]TiO[sub 3] thin film

2003 ◽  
Vol 21 (1) ◽  
pp. 453 ◽  
Author(s):  
W. P. Kang ◽  
A. Wisitsora-at ◽  
J. L. Davidson ◽  
O. K. Tan ◽  
W. G. Zhu ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Emission ◽  
Annealing Temperature ◽  
Emission Characteristics

scholarly journals Secondary electron emission characteristics of Al2O3 coatings prepared by atomic layer deposition

AIP Advances ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 095303 ◽  
Author(s):  
Junjiang Guo ◽  
Dan Wang ◽  
Yantao Xu ◽  
Xiangping Zhu ◽  
Kaile Wen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Electron Emission ◽  
Secondary Electron ◽  
Secondary Electron Emission ◽  
Atomic Layer ◽  
Emission Characteristics ◽  
Layer Deposition

scholarly journals Optimizing the Properties of La0.8Sr0.2CrO3 Thin Films through Post-Annealing for High-Temperature Sensing

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1802
Author(s):  
Dan Liu ◽  
Peng Shi ◽  
Yantao Liu ◽  
Yijun Zhang ◽  
Bian Tian ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Annealing Temperature ◽  
Rf Sputtering ◽  
Maximum Size ◽  
Cross Sectional ◽  
Post Annealing ◽  
Maximum Conductivity ◽  
Different Temperatures ◽  
Post Annealing Temperature

La0.8Sr0.2CrO3 (0.2LSCO) thin films were prepared via the RF sputtering method to fabricate thin-film thermocouples (TFTCs), and post-annealing processes were employed to optimize their properties to sense high temperatures. The XRD patterns of the 0.2LSCO thin films showed a pure phase, and their crystallinities increased with the post-annealing temperature from 800 °C to 1000 °C, while some impurity phases of Cr2O3 and SrCr2O7 were observed above 1000 °C. The surface images indicated that the grain size increased first and then decreased, and the maximum size was 0.71 μm at 1100 °C. The cross-sectional images showed that the thickness of the 0.2LSCO thin films decreased significantly above 1000 °C, which was mainly due to the evaporation of Sr2+ and Cr3+. At the same time, the maximum conductivity was achieved for the film annealed at 1000 °C, which was 6.25 × 10−2 S/cm. When the thin films post-annealed at different temperatures were coupled with Pt reference electrodes to form TFTCs, the trend of output voltage to first increase and then decrease was observed, and the maximum average Seebeck coefficient of 167.8 µV/°C was obtained for the 0.2LSCO thin film post-annealed at 1100 °C. Through post-annealing optimization, the best post-annealing temperature was 1000 °C, which made the 0.2LSCO thin film more stable to monitor the temperatures of turbine engines for a long period of time.

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