Sputter-etching characteristics of barium–strontium–titanate and bismuth–strontium–tantalate using a surface-wave high-density plasma reactor

2002 ◽  
Vol 20 (2) ◽  
pp. 530-535 ◽  
Author(s):  
L. Stafford ◽  
J. Margot ◽  
S. Delprat ◽  
M. Chaker ◽  
D. Queney
2007 ◽  
Vol 52 (11) ◽  
pp. 1300-1304 ◽  
Author(s):  
Vas. M. Mukhortov ◽  
S. I. Masychev ◽  
Yu. I. Golovko ◽  
A. V. Chub ◽  
Vl. M. Mukhortov

Author(s):  
S. Karthikeyan ◽  
P. Thirunavukkarasu ◽  
S. Surendhiran ◽  
Y.A. Syed Khadar ◽  
A. Balamurugan ◽  
...  

2008 ◽  
Vol 377 (1) ◽  
pp. 75-85 ◽  
Author(s):  
Venkataramanan Gurumurthy ◽  
Sathyaharish Jeedigunta ◽  
Sam Baylis ◽  
Priscila Spagnol ◽  
John Bumgarner ◽  
...  

2002 ◽  
Vol 45 (1) ◽  
pp. 3-12
Author(s):  
Y. Takeshima ◽  
K. Nishita ◽  
K. Tanaka ◽  
Y. Sakabe

Sign in / Sign up

Export Citation Format

Share Document