Real-time/in situ diffraction study of phase and microstructural evolution in sputtered β-Ta/Ta[sub 2]O[sub 5] films
2001 ◽
Vol 19
(6)
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pp. 2910
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2002 ◽
Vol 20
(4)
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pp. 1505-1505
2014 ◽
Vol 601
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pp. 78-85
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2011 ◽
Vol 509
(1)
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pp. 172-176
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1996 ◽
Vol 92
(7)
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pp. 1277
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2014 ◽
Vol 136
(22)
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pp. 8100-8109
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