Real-time/in situ diffraction study of phase and microstructural evolution in sputtered β-Ta/Ta[sub 2]O[sub 5] films

2001 ◽  
Vol 19 (6) ◽  
pp. 2910 ◽  
Author(s):  
J. F. Whitacre ◽  
S. M. Yalisove ◽  
J. C. Bilello
2011 ◽  
Vol 509 (1) ◽  
pp. 172-176 ◽  
Author(s):  
W.K. Pang ◽  
I.M. Low ◽  
B.H. O’Connor ◽  
V.K. Peterson ◽  
A.J. Studer ◽  
...  

2014 ◽  
Vol 136 (22) ◽  
pp. 8100-8109 ◽  
Author(s):  
Yaroslav Filinchuk ◽  
Nikolay A. Tumanov ◽  
Voraksmy Ban ◽  
Heng Ji ◽  
Jiang Wei ◽  
...  

2009 ◽  
Vol 122 (4) ◽  
pp. 775-778 ◽  
Author(s):  
Franck Millange ◽  
Manuela I. Medina ◽  
Nathalie Guillou ◽  
Gérard Férey ◽  
Kathryn M. Golden ◽  
...  

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