Atomic force microscopy observation of layer-by-layer growth of ultrathin silicon dioxide by ozone gas at room temperature

Author(s):  
T. Maeda ◽  
A. Kurokawa ◽  
K. Sakamoto ◽  
A. Ando ◽  
H. Itoh ◽  
...  
2013 ◽  
Vol 32 (1) ◽  
pp. 181-188 ◽  
Author(s):  
Yusuke HASHIMOTO ◽  
Yoshiya HASHIMOTO ◽  
Aki NISHIURA ◽  
Naoyuki MATSUMOTO

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