Anisotropic etching of polymer films by high energy (∼100s of eV) oxygen atom neutral beams

2001 ◽  
Vol 19 (2) ◽  
pp. 398-404 ◽  
Author(s):  
Siddhartha Panda ◽  
Demetre J. Economou ◽  
Lee Chen
2004 ◽  
Author(s):  
M. Braunstein ◽  
J. Duff ◽  
R. Shroll ◽  
L. Bernstein ◽  
S. Adler-Golden

Vacuum ◽  
1992 ◽  
Vol 43 (5-7) ◽  
pp. 699-701 ◽  
Author(s):  
L Ya Alimova ◽  
IE Djamaletdinova ◽  
TS Pugacheva ◽  
IE Ilicheva

2018 ◽  
Vol 121 (6) ◽  
Author(s):  
R. Thomaz ◽  
P. Louette ◽  
G. Hoff ◽  
S. Müller ◽  
J. J. Pireaux ◽  
...  

1983 ◽  
Vol 69 (3-4) ◽  
pp. 247-251
Author(s):  
M. A. Kumakhov ◽  
F. F. Komarov
Keyword(s):  

Nukleonika ◽  
2016 ◽  
Vol 61 (4) ◽  
pp. 419-423
Author(s):  
Klara Mitosinkova ◽  
Jan Stöckel ◽  
Jozef Varju ◽  
Vladimir Weinzettl

Abstract The COMPASS tokamak is equipped with two identical neutral beam injectors (NBI) for additional plasma heating. They provide a beam of deuterium atoms with a power of up to ~(2 × 300) kW. We show that the neutral beam is not monoenergetic but contains several energy components. An accurate knowledge of the neutral beam power in each individual energy component is essential for a detailed description of the beam- -plasma interaction and better understanding of the NBI heating processes in the COMPASS tokamak. This paper describes the determination of individual energy components in the neutral beam from intensities of the Doppler-shifted Dα lines, which are measured by a high-resolution spectrometer viewing the neutral beam-line at the exit of NBI. Furthermore, the divergence of beamlets escaping single aperture of the last accelerating grid is deduced from the width of the Doppler-shifted lines. Recently, one of the NBI systems was modified by the removal of the Faraday copper shield from the ion source. The comparison of the beam composition and the beamlet divergence before and after this modification is also presented.


1983 ◽  
Vol 25 ◽  
Author(s):  
T. Venkatesan

ABSTRACTRecent results on the effects of high energy ion beam irradiation in polymer films are reviewed in this paper. High energy ions (>10 keV/amu) deposit a large amount of energy (∼several cV/atom) in ionizing the electrons of the target atoms. This results in significant destruction of bonds in the films as a result of which polymers undergo rapid dissociation. Using a quadrupole mass spectrometer the study of transient emission of molecular species produced by an ion pulse has been shown to yield information about the diffusion and reaction kinetics of various molecules in the polymer. The fact that polymers undergo dissociation and those atoms which form volatile species are selectively depleted from the film could be utilized in producing useful inorganic composites by ion bombardment of polymers. For example, hard SiC composite films have been produced by ion beam irradiation of organo-silicon polymers. Eventually, polymer dissociation leads to a predominately carbon containing film which exhibits interesting electronic transport properties. Experiments on ion irradiated, pure carbon films indicate that a metallic form of carbon is produced from the polymer films at high irradiation doses.


1989 ◽  
Vol 15 (2P2A) ◽  
pp. 734-739 ◽  
Author(s):  
W. R. Becraft ◽  
† J.H. Whealton ◽  
T.P. Wangler ◽  
‡ A. Schempp ◽  
** G.E. McMichael ◽  
...  

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