Structural, morphological, and mechanical properties of plasma deposited hydrogenated amorphous carbon thin films: Ar gas dilution effects

2001 ◽  
Vol 19 (4) ◽  
pp. 1611-1616 ◽  
Author(s):  
L. Valentini ◽  
J. M. Kenny ◽  
G. Mariotto ◽  
P. Tosi ◽  
G. Carlotti ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Hydrogenated Amorphous Carbon ◽  
Carbon Thin Films ◽  
Gas Dilution ◽  
Ar Gas ◽  
Dilution Effects ◽  
Hydrogenated Amorphous

scholarly journals Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

2014 ◽  
Vol 258 ◽  
pp. 219-224 ◽  
Author(s):  
S.M.M. Dufrène ◽  
F. Cemin ◽  
M.R.F. Soares ◽  
C. Aguzzoli ◽  
M.E.H. Maia da Costa ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Dc Plasma ◽  
Hydrogenated Amorphous Carbon ◽  
Pulsed Dc ◽  
Electrostatic Confinement ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous
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