Comparative study of sputtered and spin-coatable aluminum oxide electron beam resists

2000 ◽  
Vol 18 (6) ◽  
pp. 2737 ◽  
Author(s):  
M. S. M. Saifullah ◽  
K. Kurihara ◽  
C. J. Humphreys
Keyword(s):  
Electron Beam ◽  
Aluminum Oxide ◽  
Comparative Study

Electrical properties of aluminum oxide ceramics film on a metal

2021 ◽  
Vol 2 ◽  
pp. 59-65
Author(s):  
I. Yu. Bakeev ◽  
◽  
Yu. A. Burachevsky ◽  
E. S. Dvilis ◽  
D. B. Zolotukhin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electrical Properties ◽  
Aluminum Oxide ◽  
Relative Dielectric Constant ◽  
Plasma Electron ◽  
Electron Beam Evaporation ◽  
Original Method ◽  
Alumina Powder ◽  
Oxide Ceramic ◽  
Temperature Dependences

The work is devoted to the study of electrical properties (temperature dependences of conductivity, relative dielectric constant, dielectric loss tangent for various frequencies) of an aluminum oxide ceramic film deposited on a metal substrate. The film was created by the original method of electron beam evaporation of a non-conductive target, consisting of a compressed alumina powder, using a plasma electron source, which is able to reliably operate in the fore-vacuum pressure range (5 – 100 Pa). Such increased working gas pressures ensures the generation of a dense beam plasma near the target, which neutralizes the charging of a non-conducting target and thereby provides its effective melting and electron beam evaporation.

scholarly journals A Comparative Study of Deep-UV Thin Resist by Electron Beam Stabilization.

2000 ◽  
Vol 13 (4) ◽  
pp. 497-502
Author(s):  
Myoung-Soo Kim ◽  
Dong-Heok Park ◽  
Min-Sub Han ◽  
Hak-Joon Kim ◽  
Myung-Goon Gil ◽  
...  
Keyword(s):  
Electron Beam ◽  
Comparative Study ◽  
Deep Uv

scholarly journals Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

2018 ◽  
Vol 8 (1) ◽  
Author(s):  
Michal Horák ◽  
Kristýna Bukvišová ◽  
Vojtěch Švarc ◽  
Jiří Jaskowiec ◽  
Vlastimil Křápek ◽  
...  
Keyword(s):  
Electron Beam ◽  
Comparative Study ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Lithography
Sign in / Sign up

Export Citation Format

Share Document