SCALPEL aerial image monitoring: Principles and application to space charge

2000 ◽  
Vol 18 (5) ◽  
pp. 2560 ◽  
Author(s):  
G. M. Gallatin ◽  
R. C. Farrow ◽  
J. A. Liddle ◽  
W. K. Waskiewicz ◽  
M. M. Mkrtchyan ◽  
...  
Keyword(s):  
Space Charge ◽  
Aerial Image ◽  
Image Monitoring

RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles

2005 ◽  
Author(s):  
M. Booth ◽  
A. Brunton ◽  
J. Cashmore ◽  
P. Elbourn ◽  
G. Elliner ◽  
...  
Keyword(s):  
High Resolution ◽  
Aerial Image ◽  
High Resolution Imaging ◽  
Imaging Tool ◽  
Image Monitoring ◽  
Resolution Imaging

RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

2006 ◽  
Author(s):  
M. Booth ◽  
A. Brunton ◽  
J. Cashmore ◽  
P. Elbourn ◽  
G. Elliner ◽  
...  
Keyword(s):  
High Resolution ◽  
Aerial Image ◽  
High Resolution Imaging ◽  
Imaging Tool ◽  
Image Monitoring ◽  
Resolution Imaging

High-resolution EUV imaging tools for resist exposure and aerial image monitoring

2005 ◽  
Author(s):  
M. Booth ◽  
O. Brisco ◽  
A. Brunton ◽  
J. Cashmore ◽  
P Elbourn ◽  
...  
Keyword(s):  
High Resolution ◽  
Aerial Image ◽  
Image Monitoring ◽  
Euv Imaging

Electron holography of interfaces in electroceramics

1993 ◽  
Vol 51 ◽  
pp. 1088-1089
Author(s):  
Vinayak P. Dravid ◽  
V. Ravikumar ◽  
Richard Plass
Keyword(s):  
Space Charge ◽  
Direct Evidence ◽  
Materials Science ◽  
Theoretical Work ◽  
Electron Holography ◽  
Resolution Limit ◽  
Interference Phenomenon ◽  
X Ray ◽  
Electron Sources ◽  
Science Community

With the advent of coherent electron sources with cold field emission guns (cFEGs), it has become possible to utilize the coherent interference phenomenon and perform “practical” electron holography. Historically, holography was envisioned to extent the resolution limit by compensating coherent aberrations. Indeed such work has been done with reasonable success in a few laboratories around the world. However, it is the ability of electron holography to map electrical and magnetic fields which has caught considerable attention of materials science community.There has been considerable theoretical work on formation of space charge on surfaces and internal interfaces. In particular, formation and nature of space charge have important implications for the performance of numerous electroceramics which derive their useful properties from electrically active grain boundaries. Bonnell and coworkers, in their elegant STM experiments provided the direct evidence for GB space charge and its sign, while Chiang et al. used the indirect but powerful technique of x-ray microchemical profiling across GBs to infer the nature of space charge.

ELECTROLYTIC COLORATION IN ALKALI HALIDES. ROLE OF THE SPACE CHARGE ON THE COLOR PROPAGATION

1976 ◽  
Vol 37 (C7) ◽  
pp. C7-86-C7-86
Author(s):  
M. T. MONTOJO ◽  
F. JAQUE ◽  
C. SÁNCHEZ
Keyword(s):  
Space Charge ◽  
Alkali Halides

EFFECTS OF SPACE CHARGE ON THE "EFFECTIVE CROSS SECTION"

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-755-C7-756
Author(s):  
N. S. Kopeika ◽  
T. Karcher ◽  
C.S. Ih.
Keyword(s):  
Space Charge ◽  
Cross Section ◽  
Effective Cross Section
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