Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of CF[sub 4]–CH[sub 4] gas mixtures

2000 ◽  
Vol 18 (5) ◽  
pp. 2230 ◽  
Author(s):  
L. G. Jacobsohn ◽  
D. F. Franceschini ◽  
M. E. H. Maia da Costa ◽  
F. L. Freire
2008 ◽  
Vol 43 (2) ◽  
pp. 453-462 ◽  
Author(s):  
Manlin Tan ◽  
Jiaqi Zhu ◽  
Jiecai Han ◽  
Wei Gao ◽  
Aiping Liu ◽  
...  

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  

2006 ◽  
Vol 45 (10A) ◽  
pp. 7854-7859 ◽  
Author(s):  
Nobuto Yasui ◽  
Hiroshi Inaba ◽  
Hiromu Chiba ◽  
Xudong Yang ◽  
Shu Ping Lau

1998 ◽  
Author(s):  
M.P. Siegal ◽  
D.R. Tallant ◽  
J.C. Barbour ◽  
P.N. Provencio ◽  
L.J. Martinez-Miranda ◽  
...  

2004 ◽  
Vol 6 (3) ◽  
pp. 245-248 ◽  
Author(s):  
A. Lagrini ◽  
C. Deslouis ◽  
H. Cachet ◽  
M. Benlahsen ◽  
S. Charvet

Sign in / Sign up

Export Citation Format

Share Document