Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of CF[sub 4]–CH[sub 4] gas mixtures
2000 ◽
Vol 18
(5)
◽
pp. 2230
◽
1995 ◽
Vol 192
(2)
◽
pp. 493-502
◽
Keyword(s):
2019 ◽
Vol 40
(1)
◽
pp. 387-406
2004 ◽
Vol 22
(4)
◽
pp. 1857-1861
◽
Keyword(s):
2008 ◽
Vol 43
(2)
◽
pp. 453-462
◽
2009 ◽
Vol 48
(6)
◽
pp. 065501
◽
2005 ◽
Vol 14
(3-7)
◽
pp. 989-993
◽
2006 ◽
Vol 45
(10A)
◽
pp. 7854-7859
◽
Keyword(s):
2004 ◽
Vol 6
(3)
◽
pp. 245-248
◽
Keyword(s):