Characteristic Evaluation of Silicon-Based MEMS Acoustic/Acceleration Sensor

2007 ◽  
Author(s):  
Ru-Min Chao ◽  
Sie-Yu Li ◽  
Chih-Chao Hsu ◽  
Steven Y. Liang
Keyword(s):  
Monitoring System ◽  
Water Tank ◽  
Acceleration Sensor ◽  
Vibration Signals ◽  
Batch Fabrication ◽  
Economic Saving ◽  
Potential Applications ◽  
Micro Sensor ◽  
Silicon Based ◽  
Structure Layer

Due to its smallness in size and economic-saving in batch fabrication, the acoustic micro sensor shows many potential applications in the field of manufacturing and machining monitoring system if it can help to pick up information of sound and vibration signals at specific range. In this paper, brief discussion for the design of the micro-sensor and its fabrication issue will be made. Fundamental frequency testing results by the piezo-electric shaker and acoustic measurement within the water tank are given. A 6-inch silicon wafer fabrication process and sensor design having resonant frequency in the range of 20k–60k Hz are presented and discussed. By selecting appropriate thickness of the structure layer on a SOI wafer, it is possible to customer-make a micro-sensor to sense within a given-range of interest and to apply it in a manufacturing monitoring system.

Study of the Respiratory Monitoring System by Using the MEMS Acceleration Sensor

2013 ◽  
Vol 24 (1) ◽  
pp. 61 ◽  
Author(s):  
Ji Won Sung ◽  
Myong Geun Yoon ◽  
Weon Kuu Chung ◽  
Dong Wook Kim ◽  
Dong Oh Shin
Keyword(s):  
Monitoring System ◽  
Respiratory Monitoring ◽  
Acceleration Sensor

Smart Sleep Monitoring System via Passively Sensing Human Vibration Signals

2020 ◽  
pp. 1-1
Author(s):  
Fangyu Li ◽  
Maria Valero ◽  
Jose Clemente ◽  
Zion Tse ◽  
WenZhan Song
Keyword(s):  
Monitoring System ◽  
Sleep Monitoring ◽  
Vibration Signals

On vibration signals analysis in Bridge Healthy Monitoring system using wavelet transform

2008 ◽  
Author(s):  
Yu Chongchong ◽  
Zhang Jia ◽  
Jia Shuo ◽  
Yang Yang ◽  
Tu Xuyan
Keyword(s):  
Wavelet Transform ◽  
Monitoring System ◽  
Vibration Signals

Application of Piezoelectricity Acceleration Sensor to Dynamic Characteristics Monitoring of Tied Arch Bridge

2012 ◽  
Vol 184-185 ◽  
pp. 715-718 ◽  
Author(s):  
Yi Li ◽  
Zhong Guo ◽  
Hua Wei
Keyword(s):  
Real Time ◽  
Monitoring System ◽  
Dynamic Characteristics ◽  
Health Monitoring ◽  
Damping Ratio ◽  
Vibration Signal ◽  
Mode Shapes ◽  
Acceleration Sensor ◽  
Arch Bridge ◽  
Tied Arch Bridge

In bridge structural health monitoring, random vibration test and monitoring bridge dynamic characteristics provides an effective method for evaluation of bridge safety and serviceability performance. Piezoelectric accelerometer overcome the draw backs of the traditional sensor characteristic measuring instrument which are functional singleness and monopoly used, a piezoelectricity acceleration sensor performance analysis and dynamic characteristics monitoring system base on a tied arch bridge health monitoring system was designed, and the hardware structure and software of the system were introduced, acquired vibration signal can be displayed, stored, analyzed and processed in real time. The vibration frequency of the bridge structure, mode shapes and damping ratio is calculated base on the monitoring data, and the amplitude of frequency domain shows that the system was validated in actual real-time monitoring of bridge dynamic characteristics.

scholarly journals Hinge-type FBG acceleration sensor based on double elastic plate

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Zhongchao Qiu ◽  
Jinquan Zhang ◽  
Yuntian Teng ◽  
Zhitao Gao ◽  
Li Hong
Keyword(s):  
Resonance Frequency ◽  
Elastic Plate ◽  
High Frequency ◽  
Large Scale ◽  
Acceleration Sensor ◽  
Medium Frequency ◽  
Vibration Signals ◽  
High Frequency Vibration ◽  
Large Scale Structures ◽  
Scale Structures

AbstractIt is critical for the health monitoring of large-scale structures such as bridge, railway and tunnel to acquire the medium-frequency and high-frequency vibration signals. To solve the problems of low sensitivity and poor transverse anti-interference of the medium-frequency and high-frequency fiber acceleration sensor, a hinge-type Fiber Bragg Grating(FBG) acceleration sensor based on double elastic plate has been proposed, and the hinge and elastic plate are used as elastomer to realize the miniaturization and transverse interference suppression of the sensor. The MATLAB and the ANSYS are used for theoretical analysis and optimization of sensor sensitivity and resonance frequency, structural static stress analysis and modal simulation analysis, while the test system is built to test the sensor performance. The results show that the resonance frequency of the sensor is 1300 Hz; the sensor has a flat sensitivity response in the middle-high frequency band of 200–800 Hz; the sensitivity is about 20 pm/g, and the fiber central wavelength drift and acceleration have good linearity and stability, while the transverse anti-interference is about 3.16%, which provides a new idea for monitoring of medium-frequency and high-frequency vibration signals in large-scale structures.

Sub g Threshold Acceleration Sensor Incorporating Latched Bistable Beam

2018 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Feasibility Study ◽  
Geometric Parameters ◽  
Acceleration Sensor ◽  
High Stiffness ◽  
Micro Sensor ◽  
Acceleration Force ◽  
Inertial Switch ◽  
External Acceleration ◽  
Buckled State

We present a concept and a theoretical feasibility study of a sub g threshold inertial micro sensor, which incorporates a curved bistable beam as a suspension element. For certain range of geometric parameters such a beam can exhibit lathing, namely remain in its switched configuration at zero actuating force. Since the device can be released from its latched state by an external acceleration force, it can therefore serve as a threshold inertial switch. While the snap-through force, associated with the switching from the initial to the buckled state, cannot be reduced without decreasing the frequency of the device, the release value of the acceleration can be tailored to be arbitrarily low. This allows design of a devices with sufficiently high stiffness in the initial and latched configurations, but with a very low release threshold. Our model show that for appropriately chosen parameters, it is possible to design a sub g threshold acceleration micro switch of realistic dimensions.

scholarly journals The Achievements and Challenges of Silicon Photonics

2008 ◽  
Vol 2008 ◽  
pp. 1-7 ◽  
Author(s):  
Richard Soref
Keyword(s):  
Integrated Circuits ◽  
Silicon Photonics ◽  
Recent Progress ◽  
Photonic Integrated Circuits ◽  
Special Issue ◽  
Optoelectronic Integrated Circuits ◽  
Potential Applications ◽  
Silicon Based ◽  
Photonic Components

A brief overview of silicon photonics is given here in order to provide a context for invited and contributed papers in this special issue. Recent progress on silicon-based photonic components, photonic integrated circuits, and optoelectronic integrated circuits is surveyed. Present and potential applications are identified along with the scientific and engineering challenges that must be met in order to actualize applications. Some on-going government-sponsored projects in silicon optoelectronics are also described.

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