Fabrication of Silicon Microchannel With Integrated Heater and Temperature Sensors for Flow Boiling Studies

2008 ◽  
Author(s):  
S. Gedupudi ◽  
G. P. Cummins ◽  
H. Lin ◽  
A. J. Walton ◽  
K. Sefiane ◽  
...  
Keyword(s):  
Cross Sections ◽  
Heat Dissipation ◽  
Flow Boiling ◽  
Heat Fluxes ◽  
Heat Sinks ◽  
Single Channels ◽  
Two Phase ◽  
Mass Fluxes ◽  
Wall Superheat ◽  
Uniform Wall

Two-phase microchannel heat sinks are a promising solution to meet the requirements for cooling electronic components with high-density heat dissipation. However, their design requires a thorough understanding of flow boiling and pressure drop in microchannels. The channels described in this paper have been fabricated in silicon, with rectangular cross-sections ranging in hydraulic diameter between 0.62 and 0.1 mm, for studies of boiling in single channels. To facilitate visualisation, the top of each channel is covered with Pyrex 7740, predrilled for fluid inlet and outlet connections. Integrated tantalum resistors are located uniformly along the bottom of the channel for temperature sensing. Tantalum pentoxide and PECVD silicon dioxide (which also conformally coats the channel walls) are used to electrically insulate the sensor from any liquid in the channel. The heater is an integrated aluminium serpentine track on the back of the bottom wafer. The channel is etched down to the sensors on the bonded bottom silicon wafer using the Bosch process. The objective related to the development of these silicon microchannels is to achieve heat fluxes of 2 MW m−2 with low, near-uniform wall superheat (by means of bubble triggering and artificial nucleation sites). Experiments will be carried out with mass fluxes varying from 100 to 500 kg m−2 s−1, using de-ionized water and an organic fluid as the working fluids.

Two-Phase Electronic Cooling Using Mini-Channel and Micro-Channel Heat Sinks: Part 2—Flow Rate and Pressure Drop Constraints

1994 ◽  
Vol 116 (4) ◽  
pp. 298-305 ◽  
Author(s):  
M. B. Bowers ◽  
I. Mudawar
Keyword(s):  
Pressure Drop ◽  
Flow Rate ◽  
Heat Dissipation ◽  
Flow Boiling ◽  
Phase Region ◽  
Heat Fluxes ◽  
Heat Sinks ◽  
Micro Channel ◽  
Two Phase ◽  
Channel Geometry

Increased rate of heat dissipation from electronic chips was explored by the application of flow boiling in mini-channel (D = 2.54 mm) and micro-channel (D = 510 μm) heat sinks with special emphasis on reducing pressure drop and coolant flow rate. A pressure drop model was developed that accounts for the single-phase inlet region, the single- and two-phase heated region, and the two-phase unheated outlet region. Inlet and outlet losses associated with the abrupt contraction and expansion, respectively, were also accounted for, and so were the effects of compressibility and flashing within the two-phase region. Overall, the major contributor to pressure drop was the acceleration caused by evaporation in the channels; however, compressibility effects proved significant for the micro-channel geometry. Based upon practical considerations such as pressure drop, erosion, choking, clogging, and manufacturing ease, the mini-channel geometry was determined to offer inherent advantages over the micro-channel geometry. The latter is preferred only in situations calling for dissipation of high heat fluxes where minimizing weight and liquid inventory is a must.

Effects of Varying Geometrical Parameters on Boiling From Microfabricated Enhanced Structures

2003 ◽  
Vol 125 (1) ◽  
pp. 103-109 ◽  
Author(s):  
C. Ramaswamy ◽  
Y. Joshi ◽  
W. Nakayama ◽  
W. B. Johnson
Keyword(s):  
Heat Dissipation ◽  
Layer Structure ◽  
Single Layer ◽  
Nucleate Boiling ◽  
Heat Fluxes ◽  
Working Fluid ◽  
Geometrical Parameters ◽  
Small Range ◽  
Two Phase ◽  
Wall Superheat

The current study involves two-phase cooling from enhanced structures whose dimensions have been changed systematically using microfabrication techniques. The aim is to optimize the dimensions to maximize the heat transfer. The enhanced structure used in this study consists of a stacked network of interconnecting channels making it highly porous. The effect of varying the pore size, pitch and height on the boiling performance was studied, with fluorocarbon FC-72 as the working fluid. While most of the previous studies on the mechanism of enhanced nucleate boiling have focused on a small range of wall superheats (0–4 K), the present study covers a wider range (as high as 30 K). A larger pore and smaller pitch resulted in higher heat dissipation at all heat fluxes. The effect of stacking multiple layers showed a proportional increase in heat dissipation (with additional layers) in a certain range of wall superheat values only. In the wall superheat range 8–13 K, no appreciable difference was observed between a single layer structure and a three layer structure. A fin effect combined with change in the boiling phenomenon within the sub-surface layers is proposed to explain this effect.

Flow Boiling of R134a in Circular Microtubes—Part I: Study of Heat Transfer Characteristics

2011 ◽  
Vol 133 (5) ◽  
Author(s):  
Saptarshi Basu ◽  
Sidy Ndao ◽  
Gregory J. Michna ◽  
Yoav Peles ◽  
Michael K. Jensen
Keyword(s):  
Heat Transfer ◽  
Flow Boiling ◽  
Saturation Pressure ◽  
Heat Fluxes ◽  
Average Error ◽  
Transfer Coefficients ◽  
Two Phase ◽  
Heat Transfer Coefficients ◽  
Mass Fluxes ◽  
Two Phase Heat Transfer

An experimental study of two-phase heat transfer coefficients was carried out using R134a in uniformly heated horizontal circular microtubes with diameters from 0.50 mm to 1.60 mm over a range of mass fluxes, heat fluxes, saturation pressures, and vapor qualities. Heat transfer coefficients increased with increasing heat flux and saturation pressure but were independent of mass flux. The effects of vapor quality on heat transfer coefficients were less pronounced and varied depending on the quality. The data were compared with seven flow boiling correlations. None of the correlations predicted the experimental data very well, although they generally predicted the correct trends within limits of experimental error. A correlation was developed, which predicted the heat transfer coefficients with a mean average error of 29%. 80% of the data points were within the ±30% error limit.

Hotspot Thermal Management With Flow Boiling of Refrigerant in Ultrasmall Microgaps

2017 ◽  
Vol 139 (1) ◽  
Author(s):  
Mohamed H. Nasr ◽  
Craig E. Green ◽  
Peter A. Kottke ◽  
Xuchen Zhang ◽  
Thomas E. Sarvey ◽  
...  
Keyword(s):  
Thermal Management ◽  
Flow Boiling ◽  
Silicon Layer ◽  
Flow Regimes ◽  
Visual Observation ◽  
Heat Fluxes ◽  
Two Phase ◽  
Pin Fin ◽  
Mass Fluxes ◽  
Gap Height

As integration levels increase in next generation electronics, high power density devices become more susceptible to hotspot formation, which often imposes a thermal limitation on performance. Flow boiling of R134a in two microgap heat sink configurations was investigated as a solution for hotspot thermal management: a bare microgap and inline micro-pin fin populated microgap, both with 10 μm gap height, were tested in terms of their ability to dissipate heat fluxes approaching 5 kW/cm2 at the heat source. Additional parameters investigated include mass fluxes up to 3000 kg/m2 s at inlet pressures up to 1.5 MPa and exit qualities approaching unity. The microgap testbeds investigated consist of a silicon layer which is heated from the bottom using resistive heaters and capped with glass to enable visual observation of two-phase flow regimes. Wall temperature, device thermal resistance, and pressure drop results are presented and mapped to the dominant flow regimes that were observed in the microgap.

scholarly journals Surface Structure Enhanced Microchannel Flow Boiling

2016 ◽  
Vol 138 (9) ◽  
Author(s):  
Yangying Zhu ◽  
Dion S. Antao ◽  
Kuang-Han Chu ◽  
Siyu Chen ◽  
Terry J. Hendricks ◽  
...  
Keyword(s):  
Heat Transfer ◽  
High Performance ◽  
Capillary Flow ◽  
Flow Boiling ◽  
High Heat ◽  
Heat Fluxes ◽  
Heat Sinks ◽  
Two Phase ◽  
Thin Film Evaporation ◽  
Surface Microstructures

We investigated the role of surface microstructures in two-phase microchannels on suppressing flow instabilities and enhancing heat transfer. We designed and fabricated microchannels with well-defined silicon micropillar arrays on the bottom heated microchannel wall to promote capillary flow for thin film evaporation while facilitating nucleation only from the sidewalls. Our experimental results show significantly reduced temperature and pressure drop fluctuation especially at high heat fluxes. A critical heat flux (CHF) of 969 W/cm2 was achieved with a structured surface, a 57% enhancement compared to a smooth surface. We explain the experimental trends for the CHF enhancement with a liquid wicking model. The results suggest that capillary flow can be maximized to enhance heat transfer via optimizing the microstructure geometry for the development of high performance two-phase microchannel heat sinks.

Heat Transfer Mechanism and Flow Pattern During Flow Boiling of Water in a Vertical Narrow Channel: Experimental Results

2006 ◽  
Author(s):  
Ewelina Sobierska ◽  
Rudi Kulenovic ◽  
Rainer Mertz
Keyword(s):  
Heat Transfer ◽  
Two Phase Flow ◽  
Flow Boiling ◽  
Heat Fluxes ◽  
Transfer Mechanism ◽  
Phase Flow ◽  
Fluid Temperature ◽  
Heat Transfer Mechanism ◽  
Two Phase ◽  
Mass Fluxes

Experimental investigations on flow boiling phenomena in a vertical narrow rectangular microchannel with the hydraulic diameter dh = 0.48 mm were carried out. The experiments were performed under fluid-inlet subcooling conditions with deionised and degassed water for different mass fluxes. Investigations on pressure drop and heat transfer during single-and two-phase flow have been carried out. Moreover, flow visualisation of the two-phase flow patterns along the channel was performed using a digital high-speed video camera. The present work outlines local heat transfer coefficients for three mass fluxes (200, 700 and 1500 kg/m2s) and heat fluxes (30–110, 35–150 and 65–200 kW/m2, respectively) during two-phase flow. The fluid temperature at the inlet was about 50 °C what corresponds to inlet subcooling, depending on flow pressure conditions, from 34 °C to 57 °C. The visual observations were used to obtain a better insight about the heat transfer mechanism.

scholarly journals Evaluation of Pressure Drop of Two-Phase Flow Boiling with R290 in Horizontal Mini Channel

2021 ◽  
Vol 89 (2) ◽  
pp. 160-166
Author(s):  
Fajriocta Umar ◽  
Jong Taek Oh ◽  
Agus Sunjarianto Pamitran
Keyword(s):  
Experimental Data ◽  
Pressure Drop ◽  
Two Phase Flow ◽  
Flow Boiling ◽  
Heat Fluxes ◽  
Phase Flow ◽  
Two Phase ◽  
Mass Fluxes ◽  
Channel Tube ◽  
Inner Diameter

Various experiments on the pressure drop of a two-phase flow boiling in a mini channel tube have been carried out. This study is aimed at characteristics of the pressure drop of a two-phase flow boiling using a refrigerant R290. The experiment uses a horizontal, stainless steel, 2-m-long mini-channel tube with a 3-mm inner diameter. The experiment has been carried out using various data with the vapor qualities ranging from 0.1 to 0.9, the mass fluxes ranging 50 kg/m2s to 180 kg/m2s, and the heat fluxes ranging from 5 kW/m2 to 20 kW/m2. Furthermore, several homogeneous and separated methods were used to predict the experimental data. Li and Hibiki’s correlation give the best overall deviation pressure drop value is the most accurate with its deviation amounting 19.47%.

scholarly journals Orientation Effects in Two-Phase Microgap Flow

2019 ◽  
Vol 141 (3) ◽  
Author(s):  
Franklin L. Robinson ◽  
Avram Bar-Cohen
Keyword(s):  
Technology Development ◽  
Flow Boiling ◽  
Heat Fluxes ◽  
Forced Flow ◽  
Management Technique ◽  
Transfer Coefficients ◽  
Two Phase ◽  
Aerospace Applications ◽  
Dielectric Fluids ◽  
Mass Fluxes

The high power density of emerging electronic devices is driving the transition from remote cooling, which relies on conduction and spreading, to embedded cooling, which extracts dissipated heat on-site. Two-phase microgap coolers employ the forced flow of dielectric fluids undergoing phase change in a heated channel within or between devices. Such coolers must work reliably in all orientations for a variety of applications (e.g., vehicle-based equipment), as well as in microgravity and high-g for aerospace applications, but the lack of acceptable models and correlations for orientation- and gravity-independent operation has limited their use. Reliable criteria for achieving orientation- and gravity-independent flow boiling would enable emerging systems to exploit this thermal management technique and streamline the technology development process. As a first step toward understanding the effect of gravity in two-phase microgap flow and transport, in the present effort the authors have studied the effect of evaporator orientation, mass flux, and heat flux on flow boiling of HFE7100 in a 1.01 mm tall × 13.0 mm wide × 12.7 mm long microgap channel. Orientation-independence, defined as achieving similar critical heat fluxes (CHFs), heat transfer coefficients (HTCs), and flow regimes across orientations, was achieved for mass fluxes of 400 kg/m2 s and greater (corresponding to a Froude number of about 0.8). The present results are compared to published criteria for achieving orientation- and gravity-independence.

scholarly journals Experimental Investigation and Prediction on Pressure Drop during Flow Boiling in Horizontal Microchannels

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 510
Author(s):  
Yan Huang ◽  
Bifen Shu ◽  
Shengnan Zhou ◽  
Qi Shi
Keyword(s):  
Pressure Drop ◽  
Flow Model ◽  
Two Phase Flow ◽  
Flow Boiling ◽  
Separated Flow ◽  
Heat Fluxes ◽  
Phase Flow ◽  
Vapor Quality ◽  
Two Phase ◽  
Gas Flux

In this paper, two-phase pressure drop data were obtained for boiling in horizontal rectangular microchannels with a hydraulic diameter of 0.55 mm for R-134a over mass velocities from 790 to 1122, heat fluxes from 0 to 31.08 kW/m2 and vapor qualities from 0 to 0.25. The experimental results show that the Chisholm parameter in the separated flow model relies heavily on the vapor quality, especially in the low vapor quality region (from 0 to 0.1), where the two-phase flow pattern is mainly bubbly and slug flow. Then, the measured pressure drop data are compared with those from six separated flow models. Based on the comparison result, the superficial gas flux is introduced in this paper to consider the comprehensive influence of mass velocity and vapor quality on two-phase flow pressure drop, and a new equation for the Chisholm parameter in the separated flow model is proposed as a function of the superficial gas flux . The mean absolute error (MAE ) of the new flow correlation is 16.82%, which is significantly lower than the other correlations. Moreover, the applicability of the new expression has been verified by the experimental data in other literatures.

An Experimental Study of Bubble Nucleation Frequency in Subcooled Flow Boiling

2010 ◽  
Author(s):  
Guodong Wang
Keyword(s):  
Flow Boiling ◽  
Rectangular Cross Section ◽  
Bubble Nucleation ◽  
Heat Fluxes ◽  
Dimensionless Frequency ◽  
Micro Channel ◽  
Subcooled Flow Boiling ◽  
Nucleation Frequency ◽  
Mass Fluxes ◽  
Subcooled Flow

In this paper, a simultaneous visualization and measurement study have been carried out to investigate bubble nucleation frequency of water in micro-channel at various heat fluxes and mass fluxes. A single micro-channel with an identical rectangular cross-section having a hydraulic of 137 μm and a heating length of 30 mm was used in this experiment. It is shown that the frequency of bubble nucleation increased drastically with the increase of heat flux and was also strongly dependent on the mass flux. A dimensionless frequency of bubble nucleation was correlated in terms of the Boiling number. The predictions of bubble nucleation frequency in the microchannel are found in good agreement with experimental data with a MAE of 10.4%.

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