MOS Capacitor Micro Sensor Array for Hydrogen Gas Measurement

2007 ◽  
Author(s):  
Cheng Hu ◽  
Xidong Qu ◽  
Q. M. Jonathan Wu ◽  
Glenn Chapman
Keyword(s):  
Sensor Array ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Hydrogen Sensors ◽  
Mos Capacitor ◽  
Highly Sensitive ◽  
Gas Measurement ◽  
Micro Sensor ◽  
Capacitor Structure ◽  
Novel Design

Palladium-MOS hydrogen sensors have wide applications in the industries. This paper presents a novel design and development of a hydrogen sensor and sensor array based on MOS capacitor structure. An empirical model for sensors’ response to hydrogen concentrations is established and validated. Experimental results demonstrate that the sensor is highly sensitive to hydrogen gas, is capable of not only hydrogen leaks detection, but leaks location, and gas distribution monitoring.

scholarly journals Enhanced Hydrogen Detection in ppb-Level by Electrospun SnO2-Loaded ZnO Nanofibers

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 726 ◽  
Author(s):  
Jae-Hyoung Lee ◽  
Jin-Young Kim ◽  
Jae-Hun Kim ◽  
Sang Kim
Keyword(s):  
Gas Sensor ◽  
High Performance ◽  
Hydrogen Gas ◽  
Hydrogen Sensors ◽  
Excellent Performance ◽  
Electrospinning Technique ◽  
Hydrogen Sensing ◽  
Working Temperature ◽  
Highly Sensitive ◽  
Zno Nanofibers

High-performance hydrogen sensors are important in many industries to effectively address safety concerns related to the production, delivering, storage and use of H2 gas. Herein, we present a highly sensitive hydrogen gas sensor based on SnO2-loaded ZnO nanofibers (NFs). The xSnO2-loaded (x = 0.05, 0.1 and 0.15) ZnO NFs were fabricated using an electrospinning technique followed by calcination at high temperature. Microscopic analyses demonstrated the formation of NFs with expected morphology and chemical composition. Hydrogen sensing studies were performed at various temperatures and the optimal working temperature was selected as 300 °C. The optimal gas sensor (0.1 SnO2 loaded ZnO NFs) not only showed a high response to 50 ppb hydrogen gas, but also showed an excellent selectivity to hydrogen gas. The excellent performance of the gas sensor to hydrogen gas was mainly related to the formation of SnO2-ZnO heterojunctions and the metallization effect of ZnO.

Wearable colorimetric sensing fiber based on polyacrylonitrile with PdO@ZnO hybrids for the application of detecting H2 leakage

2020 ◽  
Vol 90 (19-20) ◽  
pp. 2198-2211
Author(s):  
Sung-Ho Hwang ◽  
Young Kwang Kim ◽  
Soon Moon Jeong ◽  
Changsoon Choi ◽  
Ka Young Son ◽  
...  
Keyword(s):  
Color Change ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Hybrid Nanoparticles ◽  
Hydrogen Sensors ◽  
Colorimetric Sensing ◽  
Hydrogen Sensing ◽  
Detection Systems ◽  
Sensing Material ◽  
Novel Method

A colorimetric hydrogen sensor has great potential for accurately detecting and monitoring the leakage of hydrogen gas on account of its fast color change in contact with hydrogen gas. However, for the practical application of the sensor, such as in gas detection systems in clothing, the flexibility and stability of the sensor need to be improved. Here, we present a novel method to fabricate a flexible colorimetric hydrogen sensor with the stable embedment of sensing material. To improve the flexibility and stability of the sensor, polyacrylonitrile nanofiber containing palladium oxide and zinc oxide hybrid nanoparticles was prepared by electrospinning. The flexible colorimetric hydrogen sensor can detect 1000 ppm hydrogen gas with excellent selectivity within 2 min. We also suggest film and yarn-type flexible colorimetric hydrogen sensors for industrial and wearable applications. A laminating process was used to prepare the film. In contrast, twisting and polydimethylsiloxane coating were used to prepare the yarn-type flexible colorimetric hydrogen sensor. Compared with a flexible colorimetric hydrogen-sensing nanofiber, the film and yarn show identical sensitivity for detecting a hydrogen leakage. These applications of hydrogen sensors could be a new insight into the design of a flexible sensor for detecting hydrogen leakage with the naked eye.

Dual MOSFET Hydrogen Sensors with Thermal Island Structure

2013 ◽  
Vol 543 ◽  
pp. 93-96
Author(s):  
Bum Joon Kim ◽  
Jung Sik Kim
Keyword(s):  
Gas Sensor ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Hydrogen Sensors ◽  
Optimal Point ◽  
Reference Device ◽  
Recovery Times ◽  
Dual Gate ◽  
Response And Recovery ◽  
Effect Transistor

A low powered hydrogen gas sensor of the FET (field-effect transistor) structure was designed, fabricated and characterized for self-compensation to outer environments. The dual-gate FET hydrogen sensor was integrated with a micro-heater and two Pt-gate FETs; a sensing device for hydrogen detection, and a reference device as an electrical compensator. The identical output between the sensitive-FET and reference-FET was stable at temperatures ranging from room temperature to 250°C due to the same temperature dependence of the currentvoltage (IV) characteristics. The Pt-FET sensor showed stable responses to hydrogen at a range of operation temperatures. The optimal point in the micro-heater operation for 5,000 ppm H2 gas injection was approximately 150°C. The highest sensitivity was 0.112 mA, and the response and recovery times were 18 sec and 19 sec, respectively. The low-power MOSFET gas sensor was found to be suitable for applications in portable gas monitoring units and automobiles.

High Temperature Hydrogen Sensor Based on Silicon Carbide (SiC) MOS Capacitor Structure

2014 ◽  
Vol 778-780 ◽  
pp. 1054-1057 ◽  
Author(s):  
Bogdan Ofrim ◽  
Gheorghe Brezeanu ◽  
Florin Draghici ◽  
Ion Rusu
Keyword(s):  
Silicon Carbide ◽  
High Temperature ◽  
Oxide Layer ◽  
Significant Influence ◽  
Hydrogen Sensor ◽  
Structure Parameters ◽  
Optimum Structure ◽  
Hydrogen Detection ◽  
Mos Capacitor ◽  
Capacitor Structure

MOS capacitor devices based on silicon carbide (SiC) are largely used as hydrogen detectors in high temperature and chemically reactive environments. A SiC MOS capacitor structure used as hydrogen sensor is analyzed by extensive simulations. The sensitivity to hydrogen detection, stability to temperature variation and dependence on interface states concentration are evaluated. The effects of structure parameters on sensors performance are also investigated. Results show that the oxide layer type and thickness and the SiC polytype have a significant influence on the detectors performance. The proposed optimum structure for high temperature hydrogen detection is based on 3C-SiC substrate and 10nm TiO2 layer. In accordance with the simulations results, three types of masks are designed for the fabrication of SiC MOS capacitor structures.

scholarly journals Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO3/Si Microring Resonator

Sensors ◽  
2019 ◽  
Vol 20 (1) ◽  
pp. 96 ◽  
Author(s):  
Sosuke Matsuura ◽  
Naoki Yamasaku ◽  
Yoshiaki Nishijima ◽  
Shinji Okazaki ◽  
Taro Arakawa
Keyword(s):  
Sol Gel ◽  
Tungsten Bronze ◽  
Complementary Metal Oxide Semiconductor ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Microring Resonator ◽  
Oxide Semiconductor ◽  
Gas Sensitivity ◽  
Highly Sensitive ◽  
New Energy

Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO3) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO3 layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (HxWO3) formed by WO3 during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach–Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed.

scholarly journals Palladium nanoparticle-decorated multi-layer Ti3C2Tx dual-functioning as a highly sensitive hydrogen gas sensor and hydrogen storage

RSC Advances ◽  
2021 ◽  
Vol 11 (13) ◽  
pp. 7492-7501
Author(s):  
Thanh Hoang Phuong Doan ◽  
Won G. Hong ◽  
Jin-Seo Noh
Keyword(s):  
Hydrogen Storage ◽  
Gas Sensor ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Dual Function ◽  
Palladium Nanoparticle ◽  
Step Process ◽  
Highly Sensitive

Nanocomposites of PdNPs and ML-Ti3C2Tx MXene are synthesized using a facile two-step process, and it is demonstrated that they can dual-function as a highly sensitive hydrogen sensor and hydrogen storage.

scholarly journals Palladium-coated narrow groove plasmonic nanogratings for highly sensitive hydrogen sensing

RSC Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 4137-4147 ◽  
Author(s):  
Senthil Subramanian ◽  
Kamal Kumar ◽  
Anuj Dhawan
Keyword(s):  
Near Infrared ◽  
Hydrogen Gas ◽  
Hydrogen Sensors ◽  
Hydrogen Sensing ◽  
Highly Sensitive ◽  
Infrared Wavelengths

In this paper, we propose novel plasmonic hydrogen sensors based on palladium coated narrow-groove plasmonic nanogratings for sensing of hydrogen gas at visible and near-infrared wavelengths.

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