Micro/Nano Piezoelectric Composites for Advanced M/NEMS
Keyword(s):
In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications.
2018 ◽
pp. 96-131
2019 ◽
Vol 31
(4)
◽
pp. e13537
◽