Micro/Nano Piezoelectric Composites for Advanced M/NEMS

Author(s):  
Xiaoning Jiang ◽  
Jian R. Yuan ◽  
An Cheng ◽  
Kevin Snook ◽  
Wesley Hackenberger

In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications.

2011 ◽  
Vol 43 (8) ◽  
pp. 838-842 ◽  
Author(s):  
Christopher M. Cilip ◽  
Phillip M. Pierorazio ◽  
Ashley E. Ross ◽  
Mohamad E. Allaf ◽  
Nathaniel M. Fried

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