Thin Film Residual Stress Assessment of MEMS Microphone Using Process Modeling Technology

2011 ◽  
Author(s):  
Han-Jung Wang ◽  
Hung-An Deng ◽  
Shih-Ying Chiang ◽  
Kuo-Ning Chiang
Keyword(s):  
Thin Film ◽  
Residual Stress ◽  
Residual Stresses ◽  
Process Modeling ◽  
Lattice Mismatch ◽  
Aluminum Film ◽  
Intrinsic Stress ◽  
Element Analysis ◽  
Modeling Technology ◽  
Mems Microphone

The characteristic of MEMS component is affected by different process procedures such as depositing and etching thin films on substrate. These processes might induce residual stresses or deformations in MEMS component, which will reduce its efficiency and quality, and it is very unfavorable in MEMS development. This study develops a methodology that uses Finite Element Analysis (FEA) along with process modeling technology to analyze the residual stress in a MEMS microphone structure. The residual stress of thin film is composed of thermal and intrinsic stress. The thermal stress can be obtained directly in FEA but not for the intrinsic stress, which is a process-dependent material property. The intrinsic stress in multilayered structure is obtained from Stoney’s experiment which measures the curvature on blanket wafer after each process. A comparison of the experimental and simulated results showed that dislocation induced intrinsic stress in aluminum can be rearrangement after first annealing. The lattice mismatch induced intrinsic stress, however, will influence the residual stress of the aluminum film when its thickness is under 1μm. The residual stresses and the deformations in two electrode plates are presented for the process simulation in the MEMS microphone. The polysilicon would buckle and warp downward if it is subjected to compressive stress. However, the polysilicon diaphragm would be flat in the positive intrinsic stress.

Effect of Residual Stress or Plastic Deformation History on Fatigue Life Simulation of Pipeline Dents

2018 ◽  
Author(s):  
Xian-Kui Zhu ◽  
Rick Wang
Keyword(s):  
Residual Stress ◽  
Plastic Deformation ◽  
Fatigue Life ◽  
Residual Stresses ◽  
Three Dimensional ◽  
Strain History ◽  
Deformation History ◽  
Stress Strain ◽  
Element Analysis ◽  
Fea Model

Mechanical dents often occur in transmission pipelines, and are recognized as one of major threats to pipeline integrity because of the potential fatigue failure due to cyclic pressures. With matured in-line-inspection (ILI) technology, mechanical dents can be identified from the ILI runs. Based on ILI measured dent profiles, finite element analysis (FEA) is commonly used to simulate stresses and strains in a dent, and to predict fatigue life of the dented pipeline. However, the dent profile defined by ILI data is a purely geometric shape without residual stresses nor plastic deformation history, and is different from its actual dent that contains residual stresses/strains due to dent creation and re-rounding. As a result, the FEA results of an ILI dent may not represent those of the actual dent, and may lead to inaccurate or incorrect results. To investigate the effect of residual stress or plastic deformation history on mechanics responses and fatigue life of an actual dent, three dent models are considered in this paper: (a) a true dent with residual stresses and dent formation history, (b) a purely geometric dent having the true dent profile with all stress/strain history removed from it, and (c) a purely geometric dent having an ILI defined dent profile with all stress/strain history removed from it. Using a three-dimensional FEA model, those three dents are simulated in the elastic-plastic conditions. The FEA results showed that the two geometric dents determine significantly different stresses and strains in comparison to those in the true dent, and overpredict the fatigue life or burst pressure of the true dent. On this basis, suggestions are made on how to use the ILI data to predict the dent fatigue life.

Stress and Fatigue Life Modeling of Cannon Breech Closures Including Effects of Material Strength and Residual Stress

2000 ◽  
Vol 123 (1) ◽  
pp. 150-154
Author(s):  
John H. Underwood ◽  
Michael J. Glennon
Keyword(s):  
Residual Stress ◽  
Finite Element ◽  
Fatigue Life ◽  
Yield Strength ◽  
Residual Stresses ◽  
Solid Mechanics ◽  
Element Model ◽  
Pressure Vessels ◽  
Material Strength ◽  
Element Analysis

Laboratory fatigue life results are summarized from several test series of high-strength steel cannon breech closure assemblies pressurized by rapid application of hydraulic oil. The tests were performed to determine safe fatigue lives of high-pressure components at the breech end of the cannon and breech assembly. Careful reanalysis of the fatigue life tests provides data for stress and fatigue life models for breech components, over the following ranges of key parameters: 380–745 MPa cyclic internal pressure; 100–160 mm bore diameter cannon pressure vessels; 1040–1170 MPa yield strength A723 steel; no residual stress, shot peen residual stress, overload residual stress. Modeling of applied and residual stresses at the location of the fatigue failure site is performed by elastic-plastic finite element analysis using ABAQUS and by solid mechanics analysis. Shot peen and overload residual stresses are modeled by superposing typical or calculated residual stress distributions on the applied stresses. Overload residual stresses are obtained directly from the finite element model of the breech, with the breech overload applied to the model in the same way as with actual components. Modeling of the fatigue life of the components is based on the fatigue intensity factor concept of Underwood and Parker, a fracture mechanics description of life that accounts for residual stresses, material yield strength and initial defect size. The fatigue life model describes six test conditions in a stress versus life plot with an R2 correlation of 0.94, and shows significantly lower correlation when known variations in yield strength, stress concentration factor, or residual stress are not included in the model input, thus demonstrating the model sensitivity to these variables.

Effect of Thermal Residual Stresses on Polymer/Metal Interfacial Adhesion

1999 ◽  
Author(s):  
Qizhou Yao ◽  
Jianmin Qu
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Coefficient Of Thermal Expansion ◽  
Interfacial Crack ◽  
Thermal Residual Stress ◽  
Element Analysis ◽  
Thermal Residual Stresses ◽  
Interfacial Cracks ◽  
Cte Mismatch ◽  
Elastic Mismatch

Abstract In this study, the apparent fracture toughness of the interfaces of several epoxy-based polymeric adhesives and metal (aluminum) substrate is experimentally measured. Double layer specimens with initial interfacial cracks are made for four-point bending tests. Thermal residual stresses exist on the interface due to the coefficient of thermal expansion (CTE) mismatch between the underfill and aluminum. Silica fillers are used to modify the CTE of the epoxy-based adhesives so that various levels of interface thermal residual stresses are achieved. Finite element analysis is also performed to quantify the effects of CTE mismatch as well as the elastic mismatch across the interface. It is found that the apparent interfacial toughness is significantly affected by the thermal residual stress, while the effect of elastic mismatch is negligible. In general thermal residual stress undermines the resistance to an interfacial crack. In some cases the residual stress is sufficient to result in adhesive and/or cohesive failure.

Numerical Simulation of Residual Stresses due to Multipass Welding in High Strength Steel Plates and Validation against Experimental Measurements

2018 ◽  
Vol 941 ◽  
pp. 269-273
Author(s):  
Constant Ramard ◽  
Denis Carron ◽  
Philippe Pilvin ◽  
Florent Bridier
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
High Strength Steel ◽  
High Strength ◽  
Steel Plates ◽  
Contour Method ◽  
Hole Drilling ◽  
Experimental Measurements ◽  
Element Analysis ◽  
Multipass Welding

Multipass arc welding is commonly used for thick plates assemblies in shipbuilding. Sever thermal cycles induced by the process generate inhomogeneous plastic deformation and residual stresses. Metallurgical transformations contribute at each pass to the residual stress evolution. Since residual stresses can be detrimental to the performance of the welded product, their estimation is essential and numerical modelling is useful to predict them. Finite element analysis of multipass welding of a high strength steel is achieved with a special emphasis on mechanical and metallurgical effects on residual stress. A welding mock-up was specially designed for experimental measurements of in-depth residual stresses using contour method and deep hole drilling and to provide a simplified case for simulation. The computed results are discussed through a comparison with experimental measurements.

A study on the residual stress measurement methods on chemical vapor deposition diamond films

1998 ◽  
Vol 13 (11) ◽  
pp. 3027-3033 ◽  
Author(s):  
Jung Geun Kim ◽  
Jin Yu
Keyword(s):  
Residual Stress ◽  
Chemical Vapor Deposition ◽  
Tensile Stress ◽  
Residual Stresses ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Peak Shift ◽  
Intrinsic Stress ◽  
Chemical Vapor Deposition Diamond

Diamond films were deposited on the p-type Si substrate with the hot filament chemical vapor deposition (HFCVD). Residual stresses in the films were measured in air by the laser curvature, the x-ray diffraction (XRD) dϕψ − sin2ψ, and the Raman peak shift methods. All of the measuring methods showed similar behaviors of residual stress that changed from a compressive to a tensile stress with increasing the film thickness. However, values of residual stresses obtained through the Raman and XRD methods were 3–4 times higher than those of the curvature method. These discrepancies involved the setting of materials constants of CVD diamond film, and determination of a peak shifting on the XRD and Raman method. In order to elucidate the disparity, we measured a Young's moduli of diamond films by using the sonic resonance method. In doing so, the Raman and XRD peak shift were calibrated by bending diamond/Si beams with diamond films by a known amount, with stress levels known a priori from the beam theory, and by monitoring the peak shifts simultaneously. Results of each measuring method showed well coincidental behaviors of residual stresses which have the stress range from −0.5 GPa to +0.7 GPa, and an intrinsic stress was caused about +0.7 GPa with tensile stress.

Fast Three-Dimensional Finite Element Analysis of Weld Overlay Application on a Formed Feeder Elbow

2011 ◽  
Author(s):  
Francis H. Ku ◽  
Pete C. Riccardella
Keyword(s):  
Residual Stress ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Residual Stresses ◽  
Nuclear Reactor ◽  
Three Dimensional ◽  
Fe Method ◽  
Element Analysis ◽  
Weld Overlay ◽  
Welding Processes

This paper presents a fast finite element analysis (FEA) model to efficiently predict the residual stresses in a feeder elbow in a CANDU nuclear reactor coolant system throughout the various stages of the manufacturing and welding processes, including elbow forming, Grayloc hub weld, and weld overlay application. The finite element (FE) method employs optimized FEA procedure along with three-dimensional (3-D) elastic-plastic technology and large deformation capability to predict the residual stresses due to the feeder forming and various welding processes. The results demonstrate that the fast FEA method captures the residual stress trends with acceptable accuracy and, hence, provides an efficient and practical tool for performing complicated parametric 3-D weld residual stress studies.

Estimation of Residual Stresses in Steel Welded Joints Using Three Dimensional Finite Element Analysis

2018 ◽  
Author(s):  
Shivdayal Patel ◽  
B. P. Patel ◽  
Suhail Ahmad
Keyword(s):  
Residual Stress ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Residual Stresses ◽  
Boundary Conditions ◽  
Welding Speed ◽  
Welded Joints ◽  
Plate Thickness ◽  
Welding Process ◽  
Element Analysis

Welding is one of the most used joining methods in the ship industry. However, residual stresses are induced in the welded joints due to the rapid heating and cooling leading to inhomogenously distributed dimensional changes and non-uniform plastic and thermal strains. A number of factors, such as welding speed, boundary conditions, weld geometry, weld thickness, welding current/voltage, number of weld passes, pre-/post-heating etc, influence the residual stress distribution. The main aim of this work is to estimate the residual stresses in welded joints through finite element analysis and to investigate the effects of boundary conditions, welding speed and plate thickness on through the thickness/surface distributions of residual stresses. The welding process is simulated using 3D Finite element model in ABAQUS FE software in two steps: 1. Transient thermal analysis and 2. Quasi-static thermo-elasto-plastic analysis. The normal residual stresses along and across the weld in the weld tow region are found to be significant with nonlinear distribution. The residual stresses increase with the increase in the thickness of the plates being welded. The nature of the normal residual stress along the weld is found to be tensile-compressive-tensile and the nature of normal residual stress across the weld is found to be tensile along the thickness direction.

Residual Stresses for In-Situ Deposition of Thin-Film High-Temperature Superconductors

1994 ◽  
Vol 116 (4) ◽  
pp. 249-257 ◽  
Author(s):  
P. E. Phelan ◽  
M. N. Ghasemi Nejhad
Keyword(s):  
Thin Film ◽  
Residual Stress ◽  
Residual Stresses ◽  
High Temperature Superconductors ◽  
Oxygen Stoichiometry ◽  
Chemical Shrinkage ◽  
In Situ Deposition ◽  
Cell Dimensions ◽  
Unit Cell Dimensions

Residual stresses are caused by nonuniform thermal expansion and chemical shrinkage taking place during processing. For thin-film high-temperature superconductors, residual stresses result because of the thermal expansion mismatch between the film and substrate, and the introduction of oxygen into the film after in-situ deposition, which makes the unit cell dimensions change (chemical shrinkage) as the oxygen stoichiometry changes. Since both the reliability of the film—especially the bond between the film and substrate—and the film critical temperature are functions of the state of stress, it is important to understand how the residual stresses vary with processing conditions. Here, a three-dimensional residual stress analysis is carried out based on laminate theory, which assumes the lateral dimensions of the entire system to be much larger than its thickness. The normal residual stress components in the film, and the peeling stress at the film/substrate interface, are calculated. The results demonstrate the crucial role that chemical shrinkage plays in the formulation of residual stresses. A large portion of the stresses arises from the initial change of the unit cell dimensions due to changes in the film oxygen stoichiometry. Therefore, the processing temperature, and especially the initial oxygen pressure in the deposition chamber, are the key variables that impact the residual stresses.

The Effect of Residual Stresses on the Fracture Resistance of Ductile Steels

2002 ◽  
Author(s):  
Noel P. O’Dowd ◽  
Yuebao Lei
Keyword(s):  
Residual Stress ◽  
Stress Field ◽  
Residual Stresses ◽  
Crack Opening ◽  
Stress Distributions ◽  
Residual Stress Field ◽  
Element Analysis ◽  
Fatigue And Fracture ◽  
Negative Effect ◽  
Fracture Performance

Tensile residual stresses, such as those generated by welding, act as crack opening stresses and can have a negative effect on the fatigue and fracture performance of a component. In this work the effect of representative residual stress distributions on the fracture behaviour of a ferritic steel has been examined using finite element analysis. A Gurson-type void growth model is used to model the effect of ductile tearing ahead of a crack. For the cases examined it is seen that a tensile residual stress field may lead to a reduction in the toughness of the material (as represented by the J-resistance curve). The observed difference in toughness can be linked to the different constraint levels in the specimens due to the introduction of the residual stress field and can be rationalised through the use of a two parameter, J–Q approach.

Experimental and Analytical Leak Characterization for Axial Through-Wall Cracks in a Liquids Pipeline

2014 ◽  
Author(s):  
Mohamed R. Chebaro ◽  
Nader Yoosef-Ghodsi ◽  
David M. Norfleet ◽  
Jason H. Bergman ◽  
Aaron C. Sutton
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Internal Pressure ◽  
Crack Opening ◽  
Full Scale ◽  
Leak Rate ◽  
Propagation Mechanism ◽  
Element Analysis ◽  
Fea Model ◽  
Experimental Findings

Three pipeline sections containing defects of interest were non-destructively tested in the field, cut out and shipped to a structural laboratory to undergo full-scale testing. The common objectives of the experiments were to determine (1) the leak initiation pressure and (2) the leak rate at various specified internal pressures. While two spools (Specimens A and B) contained through-wall cracks, the third (Specimen C) had a partial through-wall crack with similar characteristics. The capacity of through-wall defects to withstand a level of internal pressure without leaking is due to the resultant local, compressive hoop residual stresses. Specimen C underwent full-scale pressure cycling to further comprehend the crack propagation mechanism in order to correlate it to field operation and analytical fatigue life predictions. To enhance the understanding of the physical crack behaviour as a function of internal pressure, a comprehensive finite element analysis (FEA) model was built using SIMULIA’s Abaqus software. The model inputs incorporated results from the above-mentioned laboratory tests, in addition to extensive radial, circumferential and axial residual stress measurements using the X-ray diffraction (XRD) technique, obtained on three pipe spools cut out from the same line. The resulting crack opening parameters from FEA were input into a closed-form fluid mechanics (FM) model, which was calibrated against a computational fluid dynamics (CFD) model, to determine the corresponding leak initiation pressures and leak rates. These outcomes were then compared to experimental findings. The FEA and FM models were subsequently employed to carry out a parametric study for plausible combinations of feature geometries, material properties, operational pressures and residual stresses to replicate field conditions. The key outcome from this study is the experimental and analytical demonstration that, for given fluid properties and pressures, the leak threshold and leak rate for through-wall cracks are primarily dependent upon the crack geometry and local residual stress distributions.

Sign in / Sign up

Export Citation Format

Share Document