A Calibration Approach for Installation Error of Multi-Axis Laser Interferometer

Author(s):  
Shengwu Du ◽  
Jinchun Hu ◽  
Yu Zhu ◽  
Chang Tian ◽  
Ming Zhang

Multi-axis laser interferometer is generally employed in measuring multi-degree-of-freedom (M-DOF) displacement for many ultra-precision X-Y stages. In multi-axis measurement system, the installation deviation of interferometer laser beam is an important error source. In this paper, a novel calibration approach without other higher precision sensors has been presented, to calibrate the installation deviation in a 3-DOF displacement measurement system, with potential capability of calibrating 6-DOF measurement system. In the proposed method, one redundant measuring axis that is set as installation reference axis is added to the original 3-axis measurement system. Correspondingly, considering the installation deviations of 3-axis interferometer, a new displacement computational model with four equations is built. In this model, all installation deviations are constants and the displacement values are variable. Utilizing the redundant measurement information of three position points, the installation deviations are separated. The simulation results validate its feasibility. This approach can strictly ensure the parallelism and perpendicularity between measuring axes, and is easily applied to engineering.

Metals ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 954
Author(s):  
Hailong Wang ◽  
Wenping Deng ◽  
Tao Zhang ◽  
Jianhua Yao ◽  
Sujuan Wang

Material properties affect the surface finishing in ultra-precision diamond cutting (UPDC), especially for aluminum alloy 6061 (Al6061) in which the cutting-induced temperature rise generates different types of precipitates on the machined surface. The precipitates generation not only changes the material properties but also induces imperfections on the generated surface, therefore increasing surface roughness for Al6061 in UPDC. To investigate precipitate effect so as to make a more precise control for the surface quality of the diamond turned Al6061, it is necessary to confirm the compositions and material properties of the precipitates. Previous studies have indicated that the major precipitate that induces scratch marks on the diamond turned Al6061 is an AlFeSi phase with the composition of Al86.1Fe8.3Si5.6. Therefore, in this paper, to study the material properties of the AlFeSi phase and its influences on ultra-precision machining of Al6061, an elastoplastic-damage model is proposed to build an elastoplastic constitutive model and a damage failure constitutive model of Al86.1Fe8.3Si5.6. By integrating finite element (FE) simulation and JMatPro, an efficient method is proposed to confirm the physical and thermophysical properties, temperature-phase transition characteristics, as well as the stress–strain curves of Al86.1Fe8.3Si5.6. Based on the developed elastoplastic-damage parameters of Al86.1Fe8.3Si5.6, FE simulations of the scratch test for Al86.1Fe8.3Si5.6 are conducted to verify the developed elastoplastic-damage model. Al86.1Fe8.3Si5.6 is prepared and scratch test experiments are carried out to compare with the simulation results, which indicated that, the simulation results agree well with those from scratch tests and the deviation of the scratch force in X-axis direction is less than 6.5%.


Author(s):  
Muhammad Zain-ul-abdein ◽  
Daniel Ne´lias ◽  
Jean-Franc¸ois Jullien ◽  
Dominique Deloison

Laser beam welding has found its application in the aircraft industry for the fabrication of fuselage panels in a T-joint configuration. However, the inconveniences like distortions and residual stresses are inevitable consequences of welding. The effort is made in this work to experimentally measure and numerically simulate the distortions induced by laser beam welding of a T-joint with industrially used thermal and mechanical boundary conditions on the thin sheets of aluminium 6056-T4. Several small scale experiments were carried out with various instrumentations to establish a database necessary to verify the simulation results. Finite element (FE) simulation is performed with Abaqus and the conical heat source is programmed in FORTRAN. Heat transfer analysis is performed to achieve the required weld pool geometry and temperature fields. Mechanical analysis is then performed with industrial loading and boundary conditions so as to predict the distortion and the residual stress pattern. A good agreement is found amongst the experimental and simulation results.


2014 ◽  
Vol 613 ◽  
pp. 58-63
Author(s):  
Hai Jin Fu ◽  
Jiu Bin Tan ◽  
Peng Cheng Hu ◽  
Zhi Gang Fan

The heterodyne laser interferometer is widely applied in ultra-precision displacement measurement, but its accuracy is seriously restricted by the optical nonlinearity which arises from the optical mixing in the reference and measurement arms. In an ideal heterodyne laser interferometer, the beam from the laser source consists of two orthogonally linear-polarized components with slightly different optical frequencies and the two components can be completely separated by the polarizing optics, one traverses in the reference arm, the other traverses in the measurement arm, both of them are in the form of a pure optical frequency. However, in a real heterodyne laser interferometer, due to the imperfect laser polarization, the optics defect and the misalignment, the two components of the laser beam cant be perfectly separated, therefore both of the reference arm and the measurement arm contain a portion of the two laser components, which leads to an optical mixing in the two arms of the heterodyne interferometer and causes the cyclic nonlinearity of several to tens of nanometers.


2021 ◽  
Vol 2021 ◽  
pp. 1-13
Author(s):  
Lei Xu ◽  
Ning Zhang ◽  
Liqing Fang ◽  
Huadong Chen ◽  
Pengfei Lin ◽  
...  

The magnetic gradient full-tensor measurement system is diverse, and the magnetometer array structure is complex. Aimed at the problem, seven magnetic gradient full-tensor measurement system models are studied in detail. The full-tensor measurement theories of the tensor measurement arrays are analyzed. Under the same baseline distance, the magnetic dipole model is used to simulate the measurement system. Based on different measurement systems, the paper quantitatively compares and analyzes the error of the structure. A more optimized magnetic gradient full-tensor measurement system is suggested. The simulation results show that the measurement accuracy of the planar measurement system is slightly higher than that of the stereo measurement system. Among them, the cross-shaped and square measurement systems have relatively smaller structural errors and higher measurement accuracy.


2018 ◽  
Vol 26 (23) ◽  
pp. 30724 ◽  
Author(s):  
Jun Yu ◽  
Zhengxiang Shen ◽  
Xiaoqiang Wang ◽  
Pengfeng Sheng ◽  
Zhanshan Wang

Author(s):  
Xiaoqin Deng ◽  
Ran Yang ◽  
Yu Niu ◽  

Space-borne gravitational wave detection imposes a demanding requirement on the sensitivity of the laser interferometer. Among all disturbances that affect the measurement accuracy of the laser interferometer, temperature fluctuations contribute significantly. In this paper, the structure model and the interference path design of Taiji-1 laser interferometer have been used to conduct a preliminary simulation analysis of the temperature fluctuation noise through the finite element method. The temperature, the displacement and the optical path difference fluctuations have been obtained and theoretically analyzed. The preliminary simulation results are consistent with the theoretical analysis, which shows that the thermal–structural–optical simulation scheme adopted in this paper is reasonable. With the preliminary simulation results and the actual temperature control of Taiji-1 laser interferometer, we estimate that in Taiji-1 laser interferometer system, the temperature fluctuation is below the order of mK, the node displacement is within [Formula: see text][Formula: see text]pm, and the interference arm length difference fluctuation amplitude of the laser interferometer is also within [Formula: see text][Formula: see text]pm.


2021 ◽  
Vol 32 (11) ◽  
Author(s):  
Rui-Yang Xu ◽  
Chun-Hui Dong ◽  
Xiao-Qing Mao ◽  
Qing-Xian Zhang ◽  
Hui Gong ◽  
...  

2017 ◽  
Vol 25 (12) ◽  
pp. 2975-2985
Author(s):  
王磊杰 WANG Lei-jie ◽  
张 鸣 ZHANG Ming ◽  
朱 煜 ZHU Yu ◽  
鲁 森 LU Sen ◽  
杨开明 YANG Kai-ming

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