Conception and Fabrication of Silicon Ring Resonator With Piezo-Resistive Detection for Force Sensing Applications

2011 ◽  
Author(s):  
Zhuang Xiong ◽  
Benjamin Walter ◽  
Estelle Mairiaux ◽  
Marc Faucher ◽  
Lionel Buchaillot ◽  
...  
Keyword(s):  
Vacuum Chamber ◽  
Ring Resonator ◽  
Force Sensing ◽  
Sensing Applications ◽  
Atomic Force ◽  
Resonance Frequencies ◽  
Mechanical Methods ◽  
Parasitic Signal ◽  
Electrical Methods ◽  
Force Resolution

A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezo-resistive detection is presented. The probe is characterized by electrical methods in vacuum chamber and by mechanical methods in air. The mixer measurement technique is developed to reduce the parasitic signal level. These probes resonance frequencies are in the 1MHz range and the quality factor is measured about 53,000 in vacuum and 3,000 in air. The force resolution deduced from the measurements is about 8 pN/Hz0.5.

Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution

2013 ◽  
Vol 3 (1) ◽  
pp. 38-52
Author(s):  
Zhuang Xiong ◽  
Benjamin Walter ◽  
Estelle Mairiaux ◽  
Marc Faucher ◽  
Lionel Buchaillot ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Measurement Technique ◽  
Vacuum Chamber ◽  
Atomic Force ◽  
Mechanical Methods ◽  
Parasitic Signal ◽  
Electrical Methods ◽  
Pmma Sample ◽  
Force Resolution ◽  
Set Up

A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezoresistive detection is presented. The probe is characterized by electrical methods in a vacuum chamber and by mechanical methods in air. The frequency-mixing measurement technique is developed to reduce the parasitic signal level. These probes resonant in the 1MHz range and the quality factor is measured about 53000 in vacuum and 3000 in air. The ring probe is mounted onto a commercial AFM set-up and the surface topography of PMMA sample (2 µm square) is obtained. The force resolution deduced from the measurements is about 10 pN/Hz0.5.

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

2009 ◽  
Vol 19 (11) ◽  
pp. 115009 ◽  
Author(s):  
B Walter ◽  
M Faucher ◽  
E Algré ◽  
B Legrand ◽  
R Boisgard ◽  
...  
Keyword(s):  
Ring Resonator ◽  
Force Sensing ◽  
Sensing Applications

Low Molecular Weight Microfibers with Light Sensing Properties

2017 ◽  
Vol 54 (4) ◽  
pp. 655-658
Author(s):  
Andrei Bejan ◽  
Dragos Peptanariu ◽  
Bogdan Chiricuta ◽  
Elena Bicu ◽  
Dalila Belei
Keyword(s):  
Molecular Weight ◽  
Low Molecular Weight ◽  
X Ray Diffraction ◽  
Aromatic Rings ◽  
X Ray ◽  
Force Microscopy ◽  
Light Sensing ◽  
Sensing Applications ◽  
Atomic Force ◽  
Low Molecular Weight Compounds

Microfibers were obtained from organic low molecular weight compounds based on heteroaromatic and aromatic rings connected by aliphatic spacers. The obtaining of microfibers was proved by scanning electron microscopy. The deciphering of the mechanism of microfiber formation has been elucidated by X-ray diffraction, infrared spectroscopy, and atomic force microscopy measurements. By exciting with light of different wavelength, florescence microscopy revealed a specific optical response, recommending these materials for light sensing applications.

scholarly journals Study of silicon nitride O-ring resonator for gas-sensing applications

2020 ◽  
Vol 1695 ◽  
pp. 012124
Author(s):  
A Elmanova ◽  
P An ◽  
V Kovalyuk ◽  
A Golikov ◽  
I Elmanov ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Ring Resonator ◽  
Gas Sensing ◽  
Sensing Applications

Stable four-wavelength ring resonator with hybrid serial-tree configuration for sensing applications

2009 ◽  
Author(s):  
Davide Passaro ◽  
Stefano Selleri ◽  
Montserrat Fernandez-Vallejo ◽  
Rosa Ana Perez-Herrera ◽  
Cesar Elosua Aguado ◽  
...  
Keyword(s):  
Ring Resonator ◽  
Sensing Applications

Lorentz Contact Resonance Imaging for Atomic Force Microscopes: Probing Mechanical and Thermal Properties on the Nanoscale

2013 ◽  
Vol 21 (6) ◽  
pp. 18-24 ◽  
Author(s):  
Eoghan Dillon ◽  
Kevin Kjoller ◽  
Craig Prater
Keyword(s):  
Viscoelastic Properties ◽  
Contact Stiffness ◽  
Mechanical And Thermal Properties ◽  
Resonance Modes ◽  
Atomic Force ◽  
Resonance Frequencies ◽  
Other Information ◽  
Afm Cantilever ◽  
Stiffness And Damping ◽  
Contact Resonance

Atomic force microscopy (AFM) has been widely used in both industry and academia for imaging the surface topography of a material with nanoscale resolution. However, often little other information is obtained. Contact resonance AFM (CR-AFM) is a technique that can provide information about the viscoelastic properties of a material in contact with an AFM probe by measuring the contact stiffness between the probe and sample. In CR-AFM, an AFM cantilever is oscillated, and the amplitude and frequency of the resonance modes of the cantilever are monitored. When a probe or sample is oscillated, the tip sample interaction can be approximated as an ideal spring-dashpot system using the Voigt-Kelvin model shown in Figure 1. Contact resonance frequencies of the AFM cantilever will shift depending on the contact stiffness, k, between the tip and sample. The damping effect on the system comes from dissipative tip sample forces such as viscosity and adhesion. Damping, η, is observed in a CR-AFM system by monitoring the amplitude and Q factor of the resonant modes of the cantilever. This contact stiffness and damping information can then be used to obtain information about the viscoelastic properties of the material when fit to an applicable model.

scholarly journals Static Force Measurement Using Piezoelectric Sensors

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Kyungrim Kim ◽  
Jinwook Kim ◽  
Xiaoning Jiang ◽  
Taeyang Kim
Keyword(s):  
Surface Charge ◽  
Piezoelectric Effect ◽  
Force Measurement ◽  
Piezoelectric Materials ◽  
Force Sensor ◽  
Piezoelectric Sensors ◽  
Force Sensing ◽  
Static Force ◽  
Sensing Applications ◽  
Direct Piezoelectric Effect

In force measurement applications, a piezoelectric force sensor is one of the most popular sensors due to its advantages of low cost, linear response, and high sensitivity. Piezoelectric sensors effectively convert dynamic forces to electrical signals by the direct piezoelectric effect, but their use has been limited in measuring static forces due to the easily neutralized surface charge. To overcome this shortcoming, several static (either pure static or quasistatic) force sensing techniques using piezoelectric materials have been developed utilizing several unique parameters rather than just the surface charge produced by an applied force. The parameters for static force measurement include the resonance frequency, electrical impedance, decay time constant, and capacitance. In this review, we discuss the detailed mechanism of these piezoelectric-type, static force sensing methods that use more than the direct piezoelectric effect. We also highlight the challenges and potentials of each method for static force sensing applications.

scholarly journals Enhancing the sensitivity of a standard plasmonic MIM square ring resonator by incorporating the Nano-dots in the cavity

2020 ◽  
Vol 12 (1) ◽  
pp. 1 ◽  
Author(s):  
Muhammad Ali ALI Butt ◽  
Nikolay Kazanskiy
Keyword(s):  
Refractive Index ◽  
Fano Resonance ◽  
Ring Resonator ◽  
Plasmonic Waveguide ◽  
Metal Insulator ◽  
Refractive Index Sensing ◽  
Sensing Applications ◽  
Resonator Design ◽  
Metal Insulator Metal ◽  
Mim Waveguide

We studied the metal-insulator-metal square ring resonator design incorporated with nano-dots that serve to squeeze the surface plasmon wave in the cavity of the ring. The E-field enhances at the boundaries of the nano-dots providing a strong interaction of light with the surrounding medium. As a result, the sensitivity of the resonator is highly enhanced compared to the standard ring resonator design. The best sensitivity of 907 nm/RIU is obtained by placing seven nano-dots of radius 4 nm in all four sides of the ring with a period (ᴧ)= 3r. The proposed design will find applications in biomedical science as highly refractive index sensors. Full Text: PDF References:Z. Han, S. I. Bozhevolnyi. "Radiation guiding with surface plasmon polaritons", Rep. Prog. Phys. 76, 016402 (2013). [CrossRef]N.L. Kazanskiy, S.N. Khonina, M.A. Butt. "Plasmonic sensors based on Metal-insulator-metal waveguides for refractive index sensing applications: A brief review", Physica E 117, 113798 (2020). [CrossRef]D.K. Gramotnev, S.I. Bozhevolnyi. "Plasmonics beyond the diffraction limit", Nat. Photonics 4, 83 (2010). [CrossRef]A.N.Taheri, H. Kaatuzian. "Design and simulation of a nanoscale electro-plasmonic 1 × 2 switch based on asymmetric metal–insulator–metal stub filters", Applied Optics 53, 28 (2014). [CrossRef]P. Neutens, L. Lagae, G. Borghs, P. V. Dorpe. "Plasmon filters and resonators in metal-insulator-metal waveguides", Optics Express 20, 4 (2012). [CrossRef]M.A. Butt, S.N. Khonina, N. L. Kazanskiy. "Metal-insulator-metal nano square ring resonator for gas sensing applications", Waves in Random and complex media [CrossRef]M.A.Butt, S.N.Khonina, N.L.Kazanskiy. "Hybrid plasmonic waveguide-assisted Metal–Insulator–Metal ring resonator for refractive index sensing", Journal of Modern Optics 65, 1135 (2018). [CrossRef]M.A.Butt, S.N. Khonina, N.L. Kazanskiy, "Highly sensitive refractive index sensor based on hybrid plasmonic waveguide microring resonator", Waves in Random and complex media [CrossRef]Y. Fang, M. Sun. "Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits", Light:Science & Applications 4, e294 (2015). [CrossRef]H. Lu, G.X. Wang, X.M. Liu. "Manipulation of light in MIM plasmonic waveguide systems", Chin Sci Bull [CrossRef]J.N. Anker et al. "Biosensing with plasmonic nanosensors", Nature Materials 7, 442 (2008). [CrossRef]M.A.Butt, S.N. Khonina, N.L. Kazanskiy. Journal of Modern Optics 66, 1038 (2019).[CrossRef]Z.-D. Zhang, H.-Y. Wang, Z.-Y. Zhang. "Fano Resonance in a Gear-Shaped Nanocavity of the Metal–Insulator–Metal Waveguide", Plasmonics 8,797 (2013) [CrossRef]Y. Yu, J. Si, Y. Ning, M. Sun, X. Deng. Opt. Lett. 42, 187 (2017) [CrossRef]B.H.Zhang, L-L. Wang, H-J. Li et al. "Two kinds of double Fano resonances induced by an asymmetric MIM waveguide structure", J. Opt. 18,065001 (2016) [CrossRef]X. Zhao, Z. Zhang, S. Yan. "Tunable Fano Resonance in Asymmetric MIM Waveguide Structure", Sensors 17, 1494 (2017) [CrossRef]J. Zhou et al. "Transmission and refractive index sensing based on Fano resonance in MIM waveguide-coupled trapezoid cavity", AIP Advances 7, 015020 (2017) [CrossRef]V. Perumal, U. Hashim. "Advances in biosensors: Principle, architecture and applications", J. Appl. Biomed. 12, 1 (2014)[CrossRef]H.Gai, J. Wang , Q. Tian, "Modified Debye model parameters of metals applicable for broadband calculations", Appl. Opt. 46 (12), 2229 (2007) [CrossRef]

scholarly journals Nanostructured Chitosan/Maghemite Composites Thin Film for Potential Optical Detection of Mercury Ion by Surface Plasmon Resonance Investigation

Polymers ◽  
2020 ◽  
Vol 12 (7) ◽  
pp. 1497
Author(s):  
Nurul Illya Muhamad Fauzi ◽  
Yap Wing Fen ◽  
Nur Alia Sheh Omar ◽  
Silvan Saleviter ◽  
Wan Mohd Ebtisyam Mustaqim Mohd Daniyal ◽  
...  
Keyword(s):  
Thin Film ◽  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Mercury Ion ◽  
Resonance Spectroscopy ◽  
Force Microscopy ◽  
Sensing Applications ◽  
Atomic Force ◽  
Fe2o3 Thin Film

In this study, synthesis and characterization of chitosan/maghemite (Cs/Fe2O3) composites thin film has been described. Its properties were characterized using Fourier transform infrared spectroscopy (FTIR), atomic force microscopy (AFM) and ultraviolet-visible spectroscopy (UV-Vis). FTIR confirmed the existence of Fe–O bond, C–N bond, C–C bond, C–O bond, O=C=O bond and O–H bond in Cs/Fe2O3 thin film. The surface morphology of the thin film indicated the relatively smooth and homogenous thin film, and also confirmed the interaction of Fe2O3 with the chitosan. Next, the UV-Vis result showed high absorbance value with an optical band gap of 4.013 eV. The incorporation of this Cs/Fe2O3 thin film with an optical-based method, i.e., surface plasmon resonance spectroscopy showed positive response where mercury ion (Hg2+) can be detected down to 0.01 ppm (49.9 nM). These results validate the potential of Cs/Fe2O3 thin film for optical sensing applications in Hg2+ detection.

Phase Contrast Imaging in Atomic Force Microscopy

1997 ◽  
Vol 3 (S2) ◽  
pp. 1275-1276
Author(s):  
Sergei Magonov
Keyword(s):  
Atomic Force Microscopy ◽  
Phase Contrast ◽  
Phase Changes ◽  
Phase Imaging ◽  
Phase Detection ◽  
Contrast Imaging ◽  
Force Microscopy ◽  
Atomic Force ◽  
Resonance Frequencies ◽  
Soft Samples

Phase detection in TappingMode™ enhances capabilities of Atomic Force Microscopy (AFM) for soft samples (polymers and biological materials). Changes of amplitude and phase changes of a fast oscillating probe are caused by tip-sample force interactions. Height images reflect the amplitude changes, and in most cases they present a sample topography. Phase images show local differences between phases of free-oscillating probe and of probe interacting with a sample surface. These differences are related to the change of the resonance frequency of the probe either by attractive or repulsive tip-sample forces. Therefore phase detection helps to choose attractive or repulsive force regime for surface imaging and to minimize tip-sample force. For heterogeneous materials the phase imaging allows to distinguish individual components and to visualize their distribution due to differences in phase contrast. This is typically achieved in moderate tapping, when set-point amplitude, Asp, is about half of the amplitude of free-oscillating cantilever, Ao. In contrast, light tapping with Asp close to Ao is best suited for recording a true topography of the topmost surface layer of soft samples. Examples of phase imaging of polymers obtained with a scanning probe microscope Nanoscope® IIIa (Digital Instruments). Si probes (225 μk long, resonance frequencies 150-200 kHz) were used.

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