Dynamic Analysis of Three Parallel Beams With Electrostatic Force Interaction
In this paper, the dynamics of a micro-machined structure with three parallel cantilevers is investigated. The cantilevers are electrically charged and apply electrostatic force to each other. The governing equations of motion are derived using Euler-Bernoulli beam theory and considering structural modal damping. The stability condition of the beams for various electric charges is also studied. In addition, the equations of motion are integrated to obtain the response of the beams in time-domain for a range of initial conditions. This response is used to study the behavior of the beams at the stability margin. The end application of the structure under investigation is in the device characterization. The dynamic stability condition and time-domain responses are used to investigate the reliability of the characterization. Once translated back to physical quantities, these results can be used for improving the measurements.