CNT Extracted Lithography

2003 ◽  
Author(s):  
Jaehyun Chung ◽  
Kyong-Hoon Lee ◽  
Junghoon Lee
Keyword(s):  
Carbon Nanotubes ◽  
Electron Beam ◽  
Electric Field ◽  
High Accuracy ◽  
Electron Beam Evaporation ◽  
Metal Deposition ◽  
High Quality ◽  
Guided Assembly ◽  
Nanoscale Features

High quality nanoscale gaps were fabricated using carbon nanotubes (CNTs) as shadow masks for metal deposition. We used electric-field guided assembly to deposit and individual multi-walled CNT (MWCNT) across a pair of electrodes. Metal was deposited by electron-beam evaporation on the substrate where MWCNT was assembled. Then, the MWCNT was removed by sonication, leaving a pattern that replicates the shape of the MWCNT. This approach enables a mass fabrication of well-defined nanoscale features aligned and positioned with high accuracy.

Low Temperature Deposited High Quality ITO Films Prepared by E-Beam Evaporation

1990 ◽  
Vol 187 ◽  
Author(s):  
C. S. Chang ◽  
J. C. Wang ◽  
L. C. Kuo
Keyword(s):  
Electron Beam ◽  
Low Temperature ◽  
Substrate Temperature ◽  
Optimal Condition ◽  
Deposition Rate ◽  
Oxygen Pressure ◽  
Electron Beam Evaporation ◽  
Film Properties ◽  
High Quality ◽  
Ito Films

AbstractAn electron beam evaporation method has been used to prepare tin doped indium oxide (ITO) films with 95 wt.% In2O3 and 5 wt.% SnO2 in an oxygen atmosphere. It was found that the deposition rate and oxygen pressure strongly influence the film properties when the substrate temperature was lower than 200°C. In an optimal condition, highly transparent (transmittance ˜ 90% at wavelength 570 nm) and conductive (resistivity – 3×10−4Ω-cm) films of thickness around 2000 Å at substrate temperature as low as 180°C can be obtained.

High quality Si/Si1−xGexlayered structures grown using a mass‐spectrometry controlled electron‐beam evaporation system

1994 ◽  
Vol 65 (14) ◽  
pp. 1772-1774 ◽  
Author(s):  
W.‐X. Ni ◽  
A. Henry ◽  
M. I. Larsson ◽  
K. Joelsson ◽  
G. V. Hansson
Keyword(s):  
Mass Spectrometry ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
High Quality

Electric-Field-Driven Fluid Flow Around Nano Particles

2004 ◽  
Author(s):  
Jaehyun Chung ◽  
Kyong-Hoon Lee ◽  
Rodney S. Ruoff ◽  
Junghoon Lee
Keyword(s):  
Carbon Nanotubes ◽  
Fluid Flow ◽  
Electric Field ◽  
Flow Patterns ◽  
Periodic Array ◽  
Nano Particles ◽  
Significant Progress ◽  
Modeling Simulation ◽  
Guided Assembly

Recently there has been significant progress in assembling an array of individual carbon nanotubes (CNTs) on microfabricated electrodes using the Composite Electric-field Guided Assembly (CEGA) method. This technology allows for integrating individual nano components with micro/nano systems, and should find application in areas such as sensors and NEMS devices. For realizing this as a viable technology, it is crucial to understand the electric-field-driven flow around the nanostructures being deposited. We previously discovered that the flow patterns that are present can lead to deposition of a periodic array CNTs. Here, we present recent experimental observations and the results of modeling/simulation on the electric-field-driven flow around CNTs. The results suggest that this method of assembling nanostructures be used for integration with an accuracy approaching tens of nanometers.

High-Quality ZrO 2 Thin Films Deposited on Silicon by High Vacuum Electron Beam Evaporation

2002 ◽  
Vol 19 (3) ◽  
pp. 395-397 ◽  
Author(s):  
Zhang Ning-Lin ◽  
Wan Qing ◽  
Song Zhi-Tang ◽  
Shen Qin-Wo ◽  
Zhu Xiang-Rong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
High Vacuum ◽  
Electron Beam Evaporation ◽  
High Quality

High Quality $\bf Nb/Al\mbox{--}AlO_{\ninmbi x}\mbox{--}Al/Nb$ Josephson Junctions by Electron Beam Evaporation

1994 ◽  
Vol 33 (Part 2, No. 12A) ◽  
pp. L1662-L1664 ◽  
Author(s):  
M. P. Janawadkar ◽  
R. Baskaran ◽  
K. Gireesan ◽  
Rita Saha ◽  
L. S. Vaidyanathan ◽  
...  
Keyword(s):  
Electron Beam ◽  
Josephson Junctions ◽  
Electron Beam Evaporation ◽  
High Quality

The Role of Al2O3 Buffer Layer in the Growth of Aligned CNTs

2008 ◽  
Vol 32 ◽  
pp. 29-32 ◽  
Author(s):  
M.K. Lai ◽  
Norani Muti Mohamed ◽  
K.M. Begam
Keyword(s):  
Carbon Nanotubes ◽  
Electron Beam ◽  
Buffer Layer ◽  
Iron Catalyst ◽  
Electron Beam Evaporation ◽  
Multiwalled Carbon ◽  
Al2o3 Layer ◽  
Si Wafer ◽  
Walled Cnts

Carbon nanotube (CNT) can be thought of as a hexagonal network of carbon atoms that has been rolled up to make a seamless cylinder. If they are consisting of one layer, they are termed singled-walled CNTs (SWNTs) while if there are multiple walls, they are called multi-walled CNTs (MWNTs). For most functional devices application, an aligned arrangement of CNTs is desired. Aligned multiwalled carbon nanotubes (MWNTs) have been successfully grown by the inclusion of a buffer layer of oxidized Al. An Al2O3 layer has been proven to be an important contributing factor towards obtaining good quality aligned CNTs. In this work, Al is deposited onto the Si wafer using electron beam evaporation and later oxidized by heating in air. A thin layer of iron catalyst is then deposited on top of the oxidized Al layer and annealed at 400oC. The result shows an improvement in the intensity of the graphitization peak (G-band) in the Raman spectra and aligned MWNTs is observed in these samples compared to the ones that have undergone the same process parameter except the Al2O3 layer.

Carbon Nanotubes Dispersed Molybdenum Oxide Nanocomposite Thin Film Gas Sensor Prepared by Electron Beam Evaporation

2011 ◽  
Vol 9 (1) ◽  
pp. 348-352 ◽  
Author(s):  
C. Oros ◽  
A. Wisitsoraat ◽  
D. Phokharatkul ◽  
P. Limsuwan ◽  
A. Tuantranont
Keyword(s):  
Thin Film ◽  
Carbon Nanotubes ◽  
Electron Beam ◽  
Gas Sensor ◽  
Molybdenum Oxide ◽  
Electron Beam Evaporation ◽  
Nanocomposite Thin Film

Fabrication and characterisation of high quality ZnO thin films by reactive electron beam evaporation technique

2005 ◽  
Vol 36 (8) ◽  
pp. 694-699 ◽  
Author(s):  
R. Al Asmar ◽  
G. Ferblantier ◽  
J.L. Sauvajol ◽  
A. Giani ◽  
A. Khoury ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Zno Thin Films ◽  
High Quality ◽  
Electron Beam Evaporation Technique ◽  
Evaporation Technique
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