Parasitic-Capacitance-Induced Degradation of the Transient Behavior of Electrically-Damped Microactuators
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Abstract The influence of the parasitic capacitance on the transient behavior of two electrically-damped microactuators is investigated. Analytic modeling of the parasitic-capacitance effect is performed using the perturbation method and linear control theory. We show that the optimal control parameters are changed by the parasitic capacitance. The resultant degradation of the optimal transient behavior of two actuators is observed.
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