Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors

2000 ◽  
Author(s):  
Meng-Nian Niu ◽  
Fred J. von Preissig ◽  
Eun Sok Kim
Keyword(s):  
Residual Stress ◽  
Layer Structure ◽  
Pressure Sensors ◽  
Fem Analysis ◽  
Experimental Results ◽  
Hole Array ◽  
Hole Size ◽  
Stress Release ◽  
Film Layer ◽  
Bottom To Top

Abstract We have designed and fabricated various diaphragm-based piezoelectric microphones with film-layer structure SiN1/poly-Si/SiN2/ZnO/parylene/Al/parylene (from bottom to top) that contain various square “holes” uniformly distributed over the whole diaphragm with various hole ratios (defined to be the ratio between the total area of the holes and the whole diaphragm area). The holes (which are formed by etching out all the layers except SiN2 and top parylene in the diaphragm) are to release the residual stress in the diaphragm. We have fabricated and analyzed various microphones with and without the holes, and have observed that the microphones with the holes have significantly larger acoustic sensitivities and diaphragm displacements than those without any hole. The best microphone sensitivity of the hole-array microphones has been over 12 times greater than that of the no-hole microphones. Also, we have observed that the center displacement of the diaphragm is dependent on the hole ratio but not on the hole size. We have corroborated the experimental results with FEM analysis.

Residual Stress Evaluation of Railway Wheels by X-Ray Diffraction and Finite Element Method

2010 ◽  
Vol 89-91 ◽  
pp. 545-550
Author(s):  
Shunichi Takahashi ◽  
Takanori Kato ◽  
Hiroshi Suzuki ◽  
Toshihiko Sasaki
Keyword(s):  
Finite Element Method ◽  
Residual Stress ◽  
Finite Element ◽  
Stress State ◽  
Fem Analysis ◽  
X Ray Diffraction ◽  
Stress Release ◽  
X Ray ◽  
Railway Wheels ◽  
Hoop Direction

X-ray stress measurement is useful for determining, in a non-destructive manner, the surface stresses of engineered parts.　However, the railway wheels cannot measure because this it is very large. So it should be measured using a scaled-down model. The problem is, however, how the stress release should be considered. In this analysis, the finite element method (FEM) was applied to estimate the initial stress state using stresses released after cutting a sample obtained by the X-ray method. Railway wheels were studied in this experiment. In the early 1990s, several railroads in the northeast of the U.S.A. experienced extensive cracking in the wheels of the commuter trains. Residual stresses in the hoop direction play an important role in mechanism fatigue damage. This paper will discuss about residual stress in the hoop direction in manufactured wheels. The results of FEM analysis and the X-ray diffraction method confirms that these methods can be used to evaluate the residual stress of the hoop direction. There is very good quantitative agreement between the simulated and measured stress distributions. It can be suggested that guessing guess stress release and the redistribution by the FEM analysis is possible. The residual hoop stress of the unused wheel presumed by this research has the residual stress of high compression in the wheel at the center of the rim up to 40mm depth.　It is very safe because the residual stress state is compressive even when a crack occurs, and obstructs the crack’s progress. If a crack occurs by any chance, the stress state can obstruct the crack’s progress.

Residual Stress Release and Its Effects on the Fatigue Strength of Typical Welded Joints in Cone-Cylinder Pressure Structures

2021 ◽  
Vol 111 ◽  
pp. 102673
Author(s):  
Liangbi Li ◽  
Jingxi Zhang ◽  
Yiwen Zhang ◽  
Deqin Zhu ◽  
Zhengquan Wan ◽  
...  
Keyword(s):  
Residual Stress ◽  
Fatigue Strength ◽  
Welded Joints ◽  
Cylinder Pressure ◽  
Stress Release

Residual Stress Evaluation of Ni Based Weld Metal Using Neutron Diffraction Method

2006 ◽  
Vol 524-525 ◽  
pp. 697-702 ◽  
Author(s):  
Shinobu Okido ◽  
Hiroshi Suzuki ◽  
K. Saito
Keyword(s):  
Residual Stress ◽  
Stainless Steel ◽  
Austenitic Stainless Steel ◽  
Neutron Diffraction ◽  
Weld Metal ◽  
Diffraction Method ◽  
Fem Analysis ◽  
Butt Weld ◽  
Stress Evaluation ◽  
Neutron Diffraction Method

Residual stress generated in Type-316 austenitic stainless steel butt-weld jointed by Inconel-182 was measured using a neutron diffraction method and compared with values calculated using FEM analysis. The measured values of Type-316 austenitic stainless steel as base material agreed well with the calculated ones. The diffraction had high intensity and a sharp profile in the base metal. However, it was difficult to measure the residual stress at the weld metal due to very weak diffraction intensities. This phenomenon was caused by the texture in the weld material generated during the weld procedure. As a result, this texture induced an inaccurate evaluation of the residual stress. Procedures for residual stress evaluation to solve this textured material problem are discussed in this paper. As a method for stress evaluation, the measured strains obtained from a different diffraction plane with strong intensity were modified with the ratio of the individual elastic constant. The values of residual stress obtained using this method were almost the same as those of the standard method using Hooke’s law. Also, these residual stress values agreed roughly with those from the FEM analysis. This evaluation method is effective for measured samples with a strong texture like Ni-based weld metal.

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

Finite Element Modeling for Prediction of Residual Stresses in Fiber Reinforced Metal Matrix Composites

1993 ◽  
Author(s):  
Partha Rangaswamy ◽  
N. Jayaraman
Keyword(s):  
Residual Stress ◽  
Finite Element ◽  
Residual Stresses ◽  
Metal Matrix Composites ◽  
Metal Matrix ◽  
Matrix Material ◽  
Unit Cell ◽  
Experimental Results ◽  
Matrix Composites ◽  
Layer Removal

Abstract In metal matrix composites residual stresses developing during the cool-down process after consolidation due to mismatch in thermal expansion coefficients between the ceramic fibers and metal matrix have been predicted using finite element analysis. Conventionally, unit cell models consisting of a quarter fiber surrounded by the matrix material have been developed for analyzing this problem. Such models have successfully predicted the stresses at the fiber-matrix interface. However, experimental work to measure residual stresses have always been on surfaces far away from the interface region. In this paper, models based on the conventional unit cell (one quarter fiber), one fiber, two fibers have been analyzed. In addition, using the element birth/death options available in the FEM code, the surface layer removal process that is conventionally used in the residual stress measuring technique has been simulated in the model. Such layer removal technique allows us to determine the average surface residual stress after each layer is removed and a direct comparison with experimental results are therefore possible. The predictions are compared with experimental results of an eight-ply unidirectional composite with Ti-24Al-11 Nb as matrix material reinforced with SCS-6 fibers.

Principle and structure of a multi-chamber piezoelectric pump with large flow rate integrated into printed circuit board

2022 ◽  
pp. 1045389X2110721
Author(s):  
Yun-Hao Peng ◽  
Dai-Hua Wang ◽  
Lian-Kai Tang
Keyword(s):  
Flow Rate ◽  
Compression Ratio ◽  
Layer Structure ◽  
Experimental Results ◽  
Processing Technology ◽  
Rate Model ◽  
Piezoelectric Pump ◽  
Central Deflection ◽  
Maximum Value ◽  
Large Flow

Parametric simulation of multi-chamber piezoelectric pump proposed by authors shows that its flow rate is positively correlated with chamber compression ratio when height of chamber wall is not less than central deflection of circular piezoelectric unimorph actuator (CPUA). Therefore, in this paper, principle and structure of multi-chamber piezoelectric pump with novel CPUAs with three-layer structure are proposed and realized, so as to improve its chamber compression ratio, and then improve its flow rate. Its processing technology compatible with PCB processing technology is studied and its flow rate model is established. Central deflection of CPUA with three-layer structure and the flow rate characteristics are tested. Experimental results show that when the central deflection of CPUA with three-layer structure reaches the maximum value of 106.8 μm, the chamber compression ratio and flow rate of multi-chamber piezoelectric pump reach the maximum value of 50% and 3.11 mL/min, respectively. The maximum flow rate is increased by 622% compared to unimproved pump. By comparing experimental results with numerical and finite element simulation results, the realized multi-chamber piezoelectric pump has large flow rate and the established flow rate model can predict its flow rate.

Influence of Residual Stress on the Thermal Expansion Behavior of Electroformed Nickel Layers

2013 ◽  
Vol 662 ◽  
pp. 511-514
Author(s):  
Yi Chun Liu ◽  
Jia Min Zhang ◽  
Jian Hong Yi
Keyword(s):  
Heat Treatment ◽  
Residual Stress ◽  
Thermal Expansion ◽  
Theoretical Analysis ◽  
Subsequent Heat Treatment ◽  
Experimental Results ◽  
Thermal Expansion Behavior ◽  
Expansion Behavior ◽  
Electroformed Nickel ◽  
The Relationship

Nickel layers with tensile or pressure residual stress were prepared by electroforming technique from two kinds of electrolyte. Subsequent heat treatment was adopted to get the stress released. The coefficients of thermal expansion (CTEs) were measured with a thermal dilatometer and the relationship between residual stress and the measured CTEs was revealed both from experimental results and theoretical analysis.

Damage Evolution of the Interphase on C/SiC Composites with CZM Method

2012 ◽  
Vol 166-169 ◽  
pp. 2847-2850
Author(s):  
Yan Jun Chang ◽  
Zhuo Li ◽  
Ke Shi Zhang
Keyword(s):  
Residual Stress ◽  
Damage Evolution ◽  
Fem Analysis ◽  
Matrix Crack ◽  
Thermal Residual Stress ◽  
Analysis Model ◽  
Initial Matrix ◽  
Thermal Residual Stresses ◽  
Initiation And Propagation ◽  
Sic Composites

Considering thermal residual stress and initial matrix crack, the cylinder FEM analysis model for C/SiC tow was established. The cohesive element and damage criterions were introduced to simulation the initiation and propagation of interphase crack processes of C/SiC composites. The thermal residual stresses release with the initial matrix crack and the cracking on interphase. The interphase crack length was dominated by the performance of interphase. Analysis demonstrated that the CZM model can simulate well the thermal residual stress and the delamination of the interphase.

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