Analytical Study of Thermal Control Method to Minimize Temperature Change of a Plate With Changing Heat Generation

2007 ◽  
Author(s):  
Shigeki Hirasawa ◽  
Shinya Ito
Keyword(s):  
Feedback Control ◽  
Temperature Change ◽  
Temperature Control ◽  
Heat Generation ◽  
Time Step ◽  
Unsteady Temperature ◽  
Feed Forward ◽  
Object Position ◽  
Feed Forward Control ◽  
Monitoring Time

In semiconductor manufacturing process, very accurate temperature control is required. In this work we studied precise temperature control methods for a simple model by numerical simulation. To minimize temperature change at an object position of a vertical plate with varying a noise-heat-generation, we calculated unsteady temperature change of the plate under the effect of a feedback control and a feed-forward control of a control-heater. The temperature change at the object position can be decreased 1/10 times (0.7°C) using the feedback control of 2 s monitoring-time-step with the control-heater placed between the object position and the noise-heat-generation position. The temperature change at the object position can be decreased 1/1000 times (0.001°C) using the feed-forward control of 2 s monitoring-time-step and 5 s forecasting-time with the control-heater placed between the noise-heat-generation position and the object position.

Study on Model Predictive Control to Minimize Temperature Change of Vertical Plate With Varying Heat Generation

2009 ◽  
Author(s):  
Shigeki Hirasawa ◽  
Shinya Ito ◽  
Kazuya Koike
Keyword(s):  
Feedback Control ◽  
Model Predictive Control ◽  
Predictive Model ◽  
Temperature Change ◽  
Predictive Control ◽  
Temperature Control ◽  
Heat Generation ◽  
Vertical Plate ◽  
Experimental Result ◽  
Object Position

Precise process temperature control of 0.001°C under circumstances of noise-temperature change of 0.1°C is required in semiconductor manufacturing process. We studied optimum control method to minimize temperature change at an object position in a 2-dimensional vertical plate with a varying noise-heat-generation and a control-heater. We numerically calculated 2-dimensional unsteady thermal conduction in the plate with feedback control, feed-forward control, and model predictive control of the control-heat-generation. The temperature change at the object position can be decreased 1/80 times smaller than that without control-heat-generation using the feedback control with two monitoring temperatures. The temperature change at the object position can be decreased 1/1000 times (0.002°C) using the model predictive control of 5 s interval with step response pattern as a dynamic predictive model. We found that the accuracy of the dynamic predictive model is very important for precise temperature control. Experiment was performed for the model predictive control with a network model as the dynamic predictive model, and the experimental result agreed with the calculation result.

scholarly journals Optimal Trajectory Planning and Linear Velocity Feedback Control of a Flexible Piezoelectric Manipulator for Vibration Suppression

2015 ◽  
Vol 2015 ◽  
pp. 1-11 ◽  
Author(s):  
Junqiang Lou ◽  
Yanding Wei ◽  
Guoping Li ◽  
Yiling Yang ◽  
Fengran Xie
Keyword(s):  
Feedback Control ◽  
Trajectory Planning ◽  
Optimal Trajectory ◽  
Vibration Suppression ◽  
Piezoelectric Actuators ◽  
Feed Forward ◽  
Feed Forward Control ◽  
Planning Approach ◽  
Quintic Polynomial ◽  
Optimal Trajectory Planning

Trajectory planning is an effective feed-forward control technology for vibration suppression of flexible manipulators. However, the inherent drawback makes this strategy inefficient when dealing with modeling errors and disturbances. An optimal trajectory planning approach is proposed and applied to a flexible piezoelectric manipulator system in this paper, which is a combination of feed-forward trajectory planning method and feedback control of piezoelectric actuators. Specifically, the joint controller is responsible for the trajectory tracking and gross vibration suppression of the link during motion, while the active controller of actuators is expected to deal with the link vibrations after joint motion. In the procedure of trajectory planning, the joint angle of the link is expressed as a quintic polynomial function. And the sum of the link vibration energy is chosen as the objective function. Then, genetic algorithm is used to determine the optimal trajectory. The effectiveness of the proposed method is validated by simulation and experiments. Both the settling time and peak value of the link vibrations along the optimal trajectory reduce significantly, with the active control of the piezoelectric actuators.

The Research of Re-Winder Bottom Roller Feed-Forward Control Tactic

2011 ◽  
Vol 225-226 ◽  
pp. 146-149
Author(s):  
Jing Wen Chen ◽  
Xiao Ping Sun
Keyword(s):  
Feedback Control ◽  
Production Process ◽  
System Response ◽  
Feed Forward ◽  
Feed Forward Control ◽  
Loop Feedback ◽  
Bottom Roller ◽  
Working Procedure ◽  
And Control

As the last working procedure in the paper production process, re-winder control technology is crucial to the quality of finished paper scroll. To obtain the paper scroll with inner tight and outer loose, the control of bottom rollers must satisfy the double closed-loop feedback control with torque difference. While the feedback control exists time-delay and may cause the slowness of system response. Here on the basis of re-winder production process and control requirements, a novel feed-forward control tactics is proposed to combine with feedback control. According to the compensation of feed-forward control, rapid system response is obtained and system performance is improved. And corresponding simulation shows the validity and feasibility of the feed-forward control tactics.

Experimental Study on Model Predictive Control to Minimize Temperature Change of Vertical Plate With Varying Heat Generation

2011 ◽  
Author(s):  
Shigeki Hirasawa ◽  
Tsuyoshi Kawanami
Keyword(s):  
Model Predictive Control ◽  
Predictive Model ◽  
Temperature Change ◽  
Predictive Control ◽  
Heat Generation ◽  
Step Response ◽  
Response Patterns ◽  
Object Position ◽  
Experimental Apparatus ◽  
Step Responses

Precise temperature control of 0.001°C under noise-temperature change of 0.1°C is required in semiconductor manufacturing process. We made an experimental apparatus of a vertical steel plate placed in an atmosphere with a varying noise-heat-generation and a control-heater. The noise-heat-generation is that the heating-OFF and ON every 300 s, and it makes temperature change of 3°C at an object position in the plate without control. The control-heater is controlled with the model predictive control method of 5 s interval with two monitoring temperatures to minimize temperature change at the object position in the plate. In this work, we study the effect of the dynamic predictive model on the temperature change at the object position and examine how to make the best dynamic predictive model. Three methods to make the dynamic predictive model are examined: (1) dynamic step responses are obtained by experiment, (2) dynamic step responses are obtained by calculation with a network model of the object, and (3) both step response patterns are combined. When the step response patterns obtained by experiment and calculation are combined to use, the minimum temperature change at the object position is 0.06°C and 1/50 times smaller than that without control. Also, the effect of artificial error in the dynamic predictive model on temperature change at the object position is examined by numerical simulation.

Research on Feed-Forward Controller for Electronic Throttle Control of GDI Engine Based on Nonlinear Model

2013 ◽  
Vol 860-863 ◽  
pp. 1720-1724
Author(s):  
De Gang Li ◽  
Chuang Li ◽  
Wen Ku Shi ◽  
Tao Jiang ◽  
Xiao Yan Wang
Keyword(s):  
Feedback Control ◽  
Linear Function ◽  
Nonlinear Function ◽  
Velocity Estimation ◽  
Operating Conditions ◽  
Hammerstein Model ◽  
Electronic Throttle ◽  
Feed Forward ◽  
Feed Forward Control ◽  
Observer Model

The nonlinear Hammerstein model was designed. The model was used to compensate the dynamic behavior of an electronic throttle body at different operating conditions. It consisted of a static nonlinear function and a dynamic linear function. The static nonlinear function was used to representing the coulomb friction and limp-home return springs and the dynamic linear function was used to representing dynamic piecewise-linear characteristic. An observer model, known as kalman was used for the on-line throttle position and angular velocity estimation. The control strategy was designed which combined the feed-forward control based on Hammerstein model and feedback control based on proportional-integral-derivative (PID) controller. The control structure has the quick response characteristic of the feed-forward control and disturb compensation characteristic of the feedback control. The experimental results revealed that the dynamic position control delay less than 100ms, the static position error less than 0.5o and the controller satisfied requirement of GDI for precise in-charge control.

scholarly journals Model-based feed-forward control for time-varying systems with an example for SRF cavities

2020 ◽  
Vol 53 (2) ◽  
pp. 1331-1336
Author(s):  
Sven Pfeiffer ◽  
Annika Eichler ◽  
Holger Schlarb
Keyword(s):  
Time Varying ◽  
Feed Forward ◽  
Feed Forward Control ◽  
Model Based ◽  
Time Varying Systems ◽  
Srf Cavities

Flatness Feed-Forward Control Model Based on Neural Networks

2014 ◽  
Vol 989-994 ◽  
pp. 3386-3389
Author(s):  
Zhu Wen Yan ◽  
Hen An Bu ◽  
Dian Hua Zhang ◽  
Jie Sun
Keyword(s):  
Neural Networks ◽  
Rolling Mill ◽  
Rolling Force ◽  
Work Roll ◽  
Control Model ◽  
Good Effect ◽  
Feed Forward ◽  
Force Fluctuations ◽  
Feed Forward Control ◽  
Roll Bending

The influence on the shape of the strip from rolling force fluctuations has been analyzed. The combination of intermediate roll bending and work roll bending has been adopted. The principle of rolling force feed-forward control has been analyzed. The feed-forward control model has been established on the basis of neural networks. The model has been successfully applied to a rolling mill and a good effect has been achieved.

Sign in / Sign up

Export Citation Format

Share Document